For us at ASML, documentation is not a goal; it is a means to an end. It provides our customers with information that helps them get the most out of their equipment. Faster machine installs, better ease of use, efficient maintenance, and help on how to optimize production processes: those are the things that really matter.

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Our documentation can be divided into several categories:

• (Pre) install documentation
• User documentation
• Release bulletins
• Safety documentation
• COACH
• Maintenance procedures and schedules
• Repair and troubleshooting procedures
• Spare parts and tools lists
• Applications documentation

We realize that documentation has to be available and up-to-date for everybody, no matter where you are or when you need it. That is why all our documentation is available in electronic format. Our publishing tools CustomerNet and COACH can easily be made available on any computer, while automatic updates ensure that you have the latest information, always and everywhere. We are constantly looking for ways to improve. For example, we are now implementing publishing tools based on XML, compliant with SEMI E036 standards. But whatever the means and methods, our goal will always stay the same: documentation that helps you to achieve your goals.