AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

ASML Holistic Lithography

The move to the 32-nm node and beyond presents unique challenges
for the semiconductor industry. Ultra-low k1 production techniques mean it will no
longer be enough to consider IC design, mask creation, lithography and metrology
in isolation. Instead we will need a new integrated approach to IC manufacture. The ability to optimize multiple IC production steps simultaneously is fundamental to ASML's Holistic Lithography vision.

As part of ASML's Holistic Lithography approach, FlexRayTM programmable illumination and BaseLinerTM scanner stability optimize and stabilize manufacturing process windows. The integration of Tachyon SMO and FlexRay provides unmatched co-optimization of mask and illumination source for the largest possible process window.

Press Release

Press Release Semicon 2009
Read More

Presentation

presentation Semicon 2009
Presentation Semicon West 2009

Photo's

Photo's Semicon 2009
Image Library

Home

Annual Report 2014

Annual Report 2014

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Shareholder Meeting 2015

Finance

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Twitter live

Investors

ASML customer co-investment program

Finance

Finance

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Video Interview: CFO Wolfgang Nickl Q1 Financial Results 2015

Investor Day 2014

Investor Day 2014

Annual Report 2014

Annual Report 2014

Select calendars:


Careers Calendar

Careers

Jobs at Cymer

Jobs at Cymer

Select calendars:


Careers Calendar

Twitter live

myPanels

Edit panels