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System Enhancements

Thanks to a unique modular design, ASML systems can be easily tailored through enhanced packages. 

In addition, you can readily increase the performance of existing machines – greatly extending their lifetimes as technology nodes advance. Our upgrade packages offer a cost-effective path to improving the overall value of your scanners, often providing a quick return on investment.

In the competitive semiconductor market, you need to get the maximum value from your investments in equipment. That means having the right capabilities and capacity available at the right time and for the right price.

ASML systems are designed to help you achieve just that. Our common TWINSCAN platform features a unique modular design that allows specific functionality to be easily added. We offer a wide range of system enhancements covering productivity, imaging, overlay, focus and automation. In addition, we’re continually developing new technology to extend the capabilities of our lithography solutions.

Tailor your machine to your needs
These enhancements are offered as factory options on our new machines and field upgrades for your installed base. So when you’re buying a new system, you can choose from a number of system enhancement modules to tailor the system to your specific application requirements.

Those same modules are also available to enhance the capabilities of your existing machines, extending their working lifetimes by as much as 40% – or 1 to 2 technology nodes. Our upgrades not only help you migrate to new technology nodes more quickly, they also help you improve your profitability for existing product lines by increasing product performance and the number of good die per wafer.

Furthermore, the modular TWINSCAN platform enables quicker and easier installation of upgrades, reducing your downtime. This helps to minimize the time it takes to see a return on your investment in the upgrade. In fact, many customers find they have recouped the cost of the upgrade within months.

Adding to your value of ownership
Through our system enhancements, you can add to the overall value of ownership of your systems and make better use of your available capital. By enhancing the performance of individual systems you only need invest in new functionality when you need it and you can also achieve a greater re-sale price for any surplus systems. Additionally, ASML offers you continuous improvement in productivity, imaging and overlay to support ongoing integration, product performance and technology trends.

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