ASML's Customized Imaging Solutions business unit provides lithography solutions for specialized applications such as MEMS, Photonics, Thin Film Head (TFH), and other microsystems. The group also services specialized semiconductor markets such as compound semiconductors and analog IC devices with low cost manufacturing solutions.

Products range from 1X full wafer scanning to i-line and DUV exposure systems bundled with appropriate expertise to optimize these system in the specific application for maximum cost efficiency.