ASML is the world's leading provider of lithography systems for the semiconductor industry. Headquartered in Veldhoven, the Netherlands, ASML employs more than 7,000 people.
ASML seeks to halve its worldwide1 CO2 footprint by 2015 as compared to 2010 levels. This will be achieved firstly by reducing the energy footprint in our production sites at Veldhoven, Wilton and Linkou with 92 TJ by 2015 (this is 10% of ASML’s 2010 energy footprint), and secondly through the purchase of renewable energy certificates in Veldhoven. As a leader in technology and innovation, ASML technical installations were audited in 2010 by external experts. Additional energy benchmarking of our cleanrooms in Veldhoven, Wilton and Linkou shows our installations are state of the art and energy efficient. Our total CO2 footprint in 2011 reduced to 63.8 ktons (versus target of 76,9 ktons), down from 88.7 ktons,2 in 2010.
We have developed an Energy and CO2 Master Plan in Veldhoven identifying 10% energy3 savings through structural investments. We consolidated the plans of Veldhoven, Wilton and Linkou and this will be updated on a yearly basis. The Energy and CO2 Master Plan capitalizes on energy-saving opportunities through:
optimization of cleanroom setpoints;
installation of a new cogeneration plant in Wilton and improvement of the Veldhoven cogeneration plant;
optimization of heat integration within and across buildings;
cycle time reduction of our machine production process;
optimization of IT energy efficiency.
|CO2 emissions (x106 kg)||78.4||82.5||88.7||63.8|
Measures we took in 2011 in Veldhoven, Wilton and Linkou included:
making our technical installations, such as cleanroom heating, cooling, ventilation and air conditioning, more energy efficient through improvements and replacement of equipment. We also made savings in the area of IT (see the section 'Promoting green IT' in this chapter). Together this led to a total estimated energy saving of 12 TJ/y worldwide and a reduction of 1.6 kton CO2;
installing a cogeneration plant in Wilton, operational from December 2011. This will help us to reduce emissions by 4.3 ktons in 2012, the equivalent of 23% of Wilton’s 2011 CO2 footprint;
reducing the energy demand of our new production building in Veldhoven by implementing heat recovery. This will lead to an estimated energy avoidance of 15 TJ/y and CO2 reduction of 0.9 kton once the building is fully operational;
reducing our production cycle time, meaning less energy use per produced lithography machine type, equivalent to an estimated energy saving of 10 TJ/y and a reduction of 1.2 kton CO2;
creating awareness within manufacturing of integrating energy savings as part of our cycle time reduction program;
implementing automated electricity monitoring in Veldhoven;
purchasing renewable energy certificates to the equivalent of 216 TJ energy and 26.3 kton CO2 in Veldhoven.
Although ASML produced more machines in 2011 versus 2010, our total energy footprint decreased from 919 TJ in 2010 to 911 TJ in 2011. This is mainly attributed to:
the exclusion of two sites, Richmond and Tempe, from reporting in 2011. Our site in Richmond was sold in 2010 and Tempe is no longer a manufacturing location;
the energy efficiency measures reported above through structural investment, IT improvement and reduction of our production cycle time.
|Fuels purchased (direct energy) (TJ)||316||317||382||359|
|Electricity purchased (indirect energy) (TJ)||459||498||537||552|
|Total energy used (TJ)||775||815||919||911|
The graph below shows the ratio between energy purchased and ASML’s output worldwide (in net sales). The peak in 2009 took place systematically in the semiconductor industry and is related to the last economic downturn and the way we operate our cleanrooms at a constant climate level, due to product requirements. Additionally, in the period 2008-2010, ASML opened four new production facilities in Veldhoven and in Linkou. Energy purchased per net sales decreased by 20% compared to 2010 from 0.2 x106J/euros down to 0.16 x106J/euros, bringing our energy consumption to a level comparable to that of 2007.
As shown in the next graph, our CO2 footprint decreased by 28% while our CO2 per net sales dropped by 43% from 20 kg CO2/1,000 euros in 2010 to 11 kg CO2/1,000 euros in 2011. This is a huge step forward in reducing environmental footprint with increased activities. In 2012, we seek to further reduce our total CO2 footprint to 57.1 kton. We will continue to implement the Master Plan for projects in coming years.
1Worldwide comprises three production sites and offices in Wilton, Linkou and Veldhoven.
2In 2010, ASML reported a total CO2 footprint of 85,4 ktons worldwide and a total energy consumption of 903 TJ. In striving to improve our internal insight and reporting, we noticed that the lower caloric value (LCV) of the gas used in one of our USA sites had been underestimated. The CO2 conversion factor for electricity required correction as well. Although the total consumption of gas or electricity is unchanged, the conversion factors impact the direct energy footprint, total energy footprint and CO2 footprint. Using the new correction factors led to a 2% increase of our energy footprint and 4% increase of our total CO2 footprint respectively. In 2010, ASML’s total energy footprint was thus 919 TJ (vs 903 TJ reported last year) and the CO2 emission 88.7 ktons (vs 85.4 ktons reported last year). This means our target for 2015 also increases proportionately to 44.3 ktons (vs 42.7 ktons reported last year) CO2 and 92 TJ savings (vs 90 TJ reported last year), respectively.
3ASML’s energy saving goal is defined as savings by measures compared to a baseline where no energy efficiency measures are taken. The energy usage in 2015 must be 92 TJ/y lower compared with a baseline containing no energy saving measures. An energy saving of 92 TJ/y is the equivalent of the energy use of about 5,400 Dutch households.