ASML is the world's leading provider of lithography systems for the semiconductor industry. Headquartered in Veldhoven, the Netherlands, ASML employs more than 7,000 people.
We strive to minimize waste and use materials with maximum efficiency throughout our operations. Our facilities in Veldhoven, Wilton and Linkou operate waste management Master Plans to prevent waste, expand internal materials re-use and promote recycling. In addition shipping materials are returned to the company for re-use (see the section 'Closing the materials loop' in the chapter ‘Value chain’).
Compared with most companies in our industry, we use relatively few materials, both non-hazardous and hazardous. Therefore, our overall waste disposal is only 2–3% of the amount of waste disposed by most companies in the semiconductor industry, the majority of which are chip makers.
In 2011, we exceeded our target of recycling 65% of non-hazardous waste at our site in Veldhoven, reaching a recycling level of 70.3% – a major step forward from 55% recycled non-hazardous waste in 2010. We also beat our Veldhoven target of recycling 80% of hazardous materials, achieving 83.1%.
The following steps were taken in 2011 to achieve our targets:
ASML hired a waste expert to look at new recycling opportunities in a systematic way;
Additional waste handlers assured proper segregation and handling of waste materials at ASML Veldhoven. This increased our recovery of plastics, metals and other packaging material;
Waste coffee grounds are collected at our Veldhoven site since the fourth quarter of 2011. We expect to collect about 50 tons each year, 100% of which will be recycled externally;
In April 2011, we started re-using sulfuric acid waste in our cooling towers. In our process labs at ASML Veldhoven we use new sulfuric acid to clean our developed wafers, used to test our machines. In 2011, in total 10% of all sulfuric acid waste was re-used. This allows us to limit the use of biocides, which are added to the cooling fluids to kill germs and keep the cooling systems sterile. We strive to maximize the amount of sulfuric acid re-used. The part of the sulfuric acid that cannot be re-used internally, is recycled externally;
Working with our waste handler, ASML Veldhoven has been able to recycle 100% of photoresist waste since August 2011. Previously, this waste was incinerated.
|2008||2009||2010||2011||Target 2012||Target 2015|
|Non-hazardous waste Veldhoven recycling (%)||62||52||55||70||75||90|
|Hazardous waste Veldhoven recycling (%)||73||79||77||83||80||80|
In 2011, we generated 2,030 and 156 metric tons of non-hazardous and hazardous waste respectively. The overall amount of disposed waste grew by 80%. This is mainly due to alignment of definitions of waste reporting at Wilton. Starting in 2011, and based on conclusions from our sustainability assurance report, we applied the same reporting criteria at Wilton as at Veldhoven. Previously, recyclables such as wood, cardboard, paper, metals and electronics were not included in Wilton’s waste figures according to local definitions. Furthermore, increased manufacturing, sales and number of employees at ASML contributed to higher waste figures.
In 2011, we developed a new waste reporting system and a Waste Master Plan for all our manufacturing sites. This system will be operational by April 2012. Through monthly measuring and reporting on a larger number of waste categories across the Group, we strongly believe we can improve our waste handling.
We also decided to update our waste handling targets, to make sure they meet new European Union definitions and regulations. The EU distinguishes between prevention, recovery and final disposal of waste. We will adjust our Waste Master Plan, including updated ambitious targets for Veldhoven and new targets for Wilton and Linkou for 2015, in Q1 2012.