AAA | Mobile | Help | 
  • PDF version
  • Printfriendly
  • Add to my favorites
  • Send to a friend
  • Add comments

TWINSCAN NXT:1970Ci

  • 1.35-NA 193-nm Catadioptric Projection Lens
  • FlexRay Prepared Illuminator for Maximum Flexibility
  • Significant Advancement in Stage Technology
  • Vastly Improved Overlay Performance
  • Revolutionary In-situ Metrology
  • Increased Productivity and Reduced Defectivity
  • Litho-cell stability and performance control

The TWINSCAN NXT:1970Ci Step-and-Scan system is a high-productivity, dual-stage immersion lithography tool designed for volume production 300-mm wafers at the sub 20-nm node.

Building on the successful in-line catadioptric lens design concept of the TWINSCAN NXT:1960Bi, the TWINSCAN NXT:1970Ci has a numerical aperture (NA) of 1.35 – the highest in the industry.

In-situ measurement and correction of optic aberrations enable maximum imaging performance for each wafer exposed when imaging at very low-k1.

The TWINSCAN NXT:1970Ci introduces a much improved version of the existing dual-stage concept in which stages can operate concurrently and independently. The improved stiffness and thus resulting improved dynamical performance allows significant acceleration and precision gain enabling the TWINSCAN NXT:1970Ci to achieve unprecedented focus and overlay at a significantly higher productivity level.

Advanced in-situ metrology per wafer together with a comprehensive set of options to input off-line metrology data to the scanner enable maximum overlay, focus and CDU performance on product wafers.

By combining high productivity and excellent image resolution with unprecedented overlay and focus performance, the TWINSCAN NXT:1970Ci addresses double patterning and multiple patterning requirements and thus provides a cost-effective solution for the sub 20-nm nodes.

 

Home

Annual Report 2016

Annual Report 2016

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

A look into ASML’s cleanroom

A look into ASML’s cleanroom

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Shareholder Meeting 2017

Finance

Select calendars:


Company Calendar

Press

ASML customer co-investment program

EUV: Questions and answers

EUV: Questions and answers

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

Twitter live

Investors

Annual Report 2016

Annual Report 2016

Investor Day 2016

Investor Day 2016

Share Information

Year Overview - AEX

asml image
ASML share (15 min. delayed)
AEX:
NASDAQ:

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

Video Interview: CEO Peter Wennink Q4 Financial Results 2016

Finance

Finance

ASML customer co-investment program

Select calendars:


Careers Calendar

Careers

Jobs at Cymer

Jobs at Cymer

Select calendars:


Careers Calendar

Twitter live

myPanels

Edit panels