ASML is one of the world’s leading manufacturers of chip-making equipment. Headquartered in Veldhoven, the Netherlands, ASML employs more than 14,000 people.
A well-maintained ASML lithography system has a useful life that is measured in decades. We estimate that of all the systems that ASML has shipped since the company’s inception in 1984, about 90 percent are still in use. Typically, an ASML lithography system will be used in a leading-edge fab for a large number of years, and then gets a second life with i.e. a manufacturer that makes specialized (“More than Moore”) devices, such as MEMS devices (accelerometers, gyroscopes, silicon microphones, etc.), radio frequency chips, thin-film heads for hard disk drives, or LEDs, to name just a few.
ASML’s Mature Products and Services (MPS) business refurbishes PAS 5500 and TWINSCAN lithography equipment and offers associated services. In refurbishment, a system can be adapted for a particular market, for example by adding front-to-backside alignment for MEMS and through-silicon via (TSV) applications or bowed wafer handling for LED applications. In addition, MPS can perform throughput and overlay enhancements to reduce costs in high-volume manufacturing.
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