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Wafer Alignment Design Engineer

Veldhoven, Netherlands
PhD
2-5 Professional
23-03-2018
Design Engineering
Physics, Physics / Mathematics
req1753

Introduction

If you have the strength of personality to take ownership of a problem and create a vision of how to solve it – a vision that also inspires others - then the ASML Performance & Integration Sensors department is your ideal environment for personal development and professional growth.

Job Mission

Contribute to the improvements of mainly on-product overlay by means of the development of Wafer Alignment products by designing, creating, testing and supporting models (both wafer and stage alignment), sequences, architectures, diagnostics and more. All within the restrictions imposed by customer and system specifications, costs and planning considerations.

Job Description

In executing the job mission, you will be a key player to determine improvement opportunities by using the mark position readings of the alignment sensor in an optimal way, not only for machine setup and qualification, but also for the customer. Understanding how the customer uses the ASML systems and what correction mechanisms can be applied to come to an optimal overlay contribution for the customer is key to our developments. So, you are not just improving the system performance, but improving it in a way most beneficial for our customers.

Various areas of activities:
-Develop Wafer Alignment models that can describe the wafer deformation induced by the processing of the wafers (i.e. etching, polishing, annealing, etc.) and are minimally sensitive to mark and measurement errors (i.e. measurement noise, outliers, mark deformations, mark to device offsets, etc)
-Support and improve Wafer Alignment specific setup, calibration and diagnostics tests to enable faster and more accurate machine recoveries
-Develop Stage Align models and sequences that can accurately monitor the drift of the stage and plates (TIS/PARIS) to enable accurate reticle align measurements and to be able to transfer wafer modeling results to exposure instructions
-All combined with writing or updating documentation for specifications, design, testing and analyses results.

A large part of the work is to interact within a dynamic and diverse ASML community. It is essential that you know your stakeholders and dependencies with other projects. This means that you need to have a pro-active approach, strong communicational skills and ambition to identify improvement opportunities. Enjoy, show energy, have the drive to getting people together and make them enthusiastic to reach that improvement goal.

Education

Technical University, master or PhD in physics, PDeng, or other relevant applied mathematical study, with at least 2 years of relevant work experience.

Experience

-In depth theoretical and experimental experience.
-Strong analytical ability with a pragmatic attitude. Helicopter view, broad scope and team-player. -Good communicational skills and good knowledge of English.

Personal skills

Creativity, initiative, discipline and team spirit. Strong analytical ability with a pragmatic and pro-active attitude. Good communicational skills and good command of the English language.

Context of the position

Within ASML the sector Development & Engineering is responsible for the specification and the design of the ASML products. The department Performance & Integration Sensors is responsible for development, delivery, integration and qualification of functional modules & machine/customer applications on spec, within time and budget in the areas of overlay and focus. You will be working in a multidisciplinary project team, in a dynamic and high-tech environment.

Other information

Keywords: physics, natuurkunde, modeling, test, architect, specifications, overlay, process technology, team player, pro-active

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