Mechatronics at ASML
Position a movable wafer stage to an accuracy of an atom
Our customers’ success relies on our systems’ ability to overlay patterns on a wafer with ever-increasing precision. Today, overlay requirements are around 5 nm and our wafer positioning has to be an order of magnitude better. Our current positioning sensors are accurate to around 60 picometers - that’s less than the size of a silicon atom!
Not just the accuracy is challenging
To be profitable, our customers must process wafers as quickly as possible. For a wafer stage, that means accelerating at around 50 m/s2 - about the same as a jet fighter taking off. For a reticle stage, it's more like a rocket at blast off (140 m/s2). And both overlay and productivity requirements are getting more demanding all the time.
Check our vacancies
Applying knowledge to innovate
Mechatronics at ASML isn't "copy-paste" engineering. You need to innovate; to apply everything you learned at university, your previous work experience and more to create completely new solutions on time and within budget. You'll face tough engineering constraints like working in a vacuum and environments that must be controlled to within millikelvins. And you'll need to decide what to solve in mechanics, servo control, electronics hardware or software to deliver the ideal balance of positioning accuracy, cost, reliability, manufacturability and serviceability.
Page updated on 2016-9-6 13:45 CEST