Internship: Design exploration of the low pressure gas pump
In a nutshell
No experience (Student)
Physics, Mechanical engineering
This is an internship assignment for a master’sstudent in Mechanical Engineering or Applied Physics, graduating in a field that's compatiblewith fluid dynamics.
ASML is working hard to enable greener technology by enabling smaller and more energy efficient electronics. The latest generation of lithography machines use light in the extreme ultra violet range. Since light of this wavelength (13.5 nm) is absorbed by any optical medium, reflective optics in a vacuum are used. Any dust particle can potentially ruin the light patterns that are generated in the machines. Therefore, high velocity jets of low pressure gas are used to push contamination away from sensitive modules.
This requires relatively large flows (~100’s of liters per minute) of clean hydrogen gas for particle and contamination suppression. This gas is currently burned off after it has passed through the system once, meaning that the lithography systems currently aren’t very energy efficient. This assignment aims to find a way to at least partially recycle the hydrogen flow. For this we need systems to pump low pressure (~100 Pa) gas.
There are scaling laws that can be used to estimate the efficiency of fans and pumps at lower pressure. However, it is unclear if they hold at these low pressures. Therefore we need someone to design, validate and use a test set up to determine the efficiency of various pumps and fans.
•Evaluate which pumping systems could match the requirements.
•Design a test setup to test the pumpingsystems in an existing vacuum vessel.
•Test and validate the setup.
•Determine if any of the pumping systems would suffice for our goals, and document your findings.
You’ll be working in close collaboration with experienced architect(s) and designers to bring this project to a successful end.
You are a master’s student in Mechanical Engineering or Applied Physics, graduating in a field that’s compatible with fluid dynamics. The study has both practical and theoretical aspects, where the focus will be is up to you.
We are looking for someone who asks questions and who is willing to pick up and incorporate new information quickly. We expect you to drive your own project and to prepare planning and test claims (under guidance by your supervisor).
This is an apprentice or graduation internship for 3-5 days a week with a minimum duration of 6 months. The start date can be discussed.
Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.
Furthermore, this position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.
What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.
ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.
We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.
We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.
Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.
In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.
An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?
How will you be part of progress?