30+ days ago - req11154

Internship: Explore a new calibration method for the EUV projection optical system

Optical engineering


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Optical engineering, Physics


Are you a Master's or Bachelor's student in Mathematics, Physics, Optics or a related principle and looking for a challenging internship where you can work with state of the art technology? Then this internship could be interesting for you.

Job Mission

The EUV scanner is state of the art technology, therefore there isa constant drive in the ASML factory in reducing cycle time for setting up the scanner. In this context, it needs to be investigated if the current version of the EUV projection optical system calibration sequence can be reduced further. You will be integrated in the projection optical performance team and have interactions with the sensor and metrology departments.

Job Description

Within the EUV projection team, you will be responsible for investigating and proposing an alternative calibration method in order to enable faster calibration of the EUV projection optical system. Therefore, your assignment will have high added value.

The assignment is divided in two stages:

  • Analyzing available calibration data and proving that other measurements can be used. This will be achieved by conducting correlation and systematic error analysis.
  • Looking into the applications of this new calibration measurement within the current design of the scanner. You will collaborate with the experts of the team.


You are a Master’s student in Mathematics, Physics, Optics or a related discipline. Experience from 0-1 years in a company or professional environment is preferred. Additionally, you have good knowledge of MATLAB, are analytical-oriented and can work autonomously.

This is an apprentice internship for 5 days a week with a minimum duration of minimum 3 months.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?