30+ days ago - req11244
Graduation assignment: Investigate the physical principles of plasma etching
Research & development
Chemistry & materials science
In a nutshell
Research & development
No experience (Student)
Physics, Chemistry & materials science, Mechanical engineering
Are you a Master student with interest in mathematical modeling of physical transport phenomena? Then this graduation assignment could be interesting for you.
Etching is one of the important process steps in microchip manufacturing. Apart from its direct impact on the product quality and functionality, it can lead to different errors (if not controlled), such as overlay error in lithography steps. This happens by affecting, for instance, metrology marks in the lithography tool leading to error in metrology readout and alignment. These impacts could be controlled, and possibly corrected for, if the plasma etch tool and its principles are more understood.
The aim of the current project is to investigate the physical principles of plasma etching affecting the metrology marks on the wafer. This includes investigation of:
-Plasma etch principles and its impacts on the Litho-Etch-Litho-Etch process;
-Physical parameters in plasma etch which can affect the metrology marks;
-Plasma etch mathematical modeling and description of transport phenomena in the etching tool and the impacts on the metrology marks.
The intern will start by building on to an existing simple model describing the plasma etch process. Finally, the model needs to be validated using experimental/literature data.
You are a Master student with a background in Physics, Chemical engineering or Mechanical engineering. You need to have strong affinity with mathematical modeling of physical transport phenomena. Prior knowledge to the principles of plasma is an advantage. You are eager to learn and understand and analyze the physics behind etching process and its impacts on metrology marks. Additionally, it is expected to have sufficient programming skills. The English language is required, both written and verbally.
This is a Master graduation assignment for 5 days a week with duration of a minimum 5 months.
Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.
What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.
ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.
We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.
We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.
Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.
In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.
An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?
How will you be part of progress?