7 days ago - req12506

Plasma Material Interaction Expert

Research & development

Chemistry & materials science


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Chemistry & materials science, Physics




Our Defectivity department is looking for someone with expert knowledge on interaction between hydrogen plasma and surfaces. Are you excited to make the next step and to apply your academic knowledge to the high-tech industry? Do you want to be the bridge between our research and development teams? Then this position might be a great fit!

Job Mission

You will be responsible for solving particle and molecular contamination challenges in Extreme Ultraviolet (EUV) Scanner by application of knowledge and understanding of interaction between hydrogen plasma and surfaces, both chemical and physical. Working within a team of plasma and surface-chemistry experts, you will further develop and sustain this knowledge.

Within this team, your focus will be on formulation and experimental/modeling verification of fundamental hypotheses of interactions between hydrogen plasma and surface materials, plus production and release of particles attached to such surfaces by plasma, electrostatics, chemical etching, as well as other related processes.

Job Description

Focus area will be plasma investigation in the presence of EUV in low pressure hydrogen environment in combination with material interfaces, low level contaminants and small particles.

  • Setup and validate models describing the interaction between plasma and scanner materials.
  • Design and develop off-line experiments and supporting modeling.
  • Use this analysis as an input for a new tool design or problem solution.
  • Work in the team to suggest containing of the existing problems and propose long term solutions.
  • Come up with means and methods to realize above tasks and/or improve on known practices.
  • Share your knowledge effectively with the members of the program and department.
  • Work with other architects and System Engineering to define and maintain contamination roadmap.


  • At least a Masters degree in Surface Physics or Chemistry. PhD is preferred.
  • Knowledge of interaction between plasma and surfaces is required.
  • Hands-on experience with ultra-high vacuum systems is preferred.


Minimum of 5 years' experience in modeling of plasma and plasma-surface interactions.

Personal skills

  • Ability to work independently in a dynamic explorative environment.
  • Ability to effectively assess a complex problem on the different physical scale levels from meters to nanometers .
  • Resilient and firm in challenging situations.
  • Strong analytical ability with a pragmatic attitude.
  • Critical attitude.
  • Good communicational skills and good knowledge of English.
  • Able to work in a multidisciplinary team and effectively transfer knowledge to others.

Context of the position

The holder of the position reports to the group lead Scanner Plasma Physics and is operational within multidisciplinary research projects. The group of Scanner Plasma Physics provides solutions for defectivity and optics lifetime in the scanner related to plasma processes for the existing as well as new EUV lithography systems.

Other information

This position includes occasional international travel to our customers or suppliers (US, Taiwan).