30+ days ago - req12780

Internship: Integration of the resist model calibration


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category



Are you are a Master student in Physics with a strong affinity with software and modulation? And do you have a good understanding of semiconductor Physics? Than this assignment could be interesting for you.

Job Mission

For the prediction and analysis of imaging performance ASML makes extensive use of simulation models. An important usage scenario of simulation models is to trace back observed imaging behavior as measured on customer wafers back to scanner characteristics to enable correct diagnosis and mitigation of imaging performance issues. In order to achieve this, all components involved in image formation need to be modeled with high accuracy. This is done by different models for the different components: a physical reticle model, a physical scanner model and a simplified resist model and metrology model. Here we focus on the accuracy and ease of use of the resist model used during simulation. Typically we observe that the more capable and physically accurate a resist model becomes, the more difficult it is to use.

Job Description

In this assignment you will seek to achieve a better trade-off between time spent and usability of resist-model calibration vs accuracy. To address the issue described above an empirical interpolation-based resist model has been developed and verified on several experimental cases. For this model to be practically useful for a wider group of imaging engineers, it needs to be integrated with the ASML standard lithography simulator.
In addition, a key characteristic of the new model is that it models every metrology point on the wafer separately, thereby avoiding accuracy compromises between features and greatly enhancing ease of use. Next to the interpolation-based method, you will investigate whether the same advantages can also be obtained by creating feature-specific variants of a more physically accurate model, yet still simple model known as a diffused image model.
This second part will involve model calibration optimization runs for which updates may be needed to the ASML internal resist-model calibration tool.


You are a Master student in Physics with a strong affinity with software and modulation. Requirements for this assignment include an understanding of semiconductor physics as well as being proficient in scripting, preferably in Python and Java. Furthermore, you can work independently and you are proficient in English, both written and verbal.

This is a Master apprentice internship for minimum 3 days a week with a duration of a minimum 3 months.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?