30+ days ago - req13722

Architect Vacuum Systems project

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category





You combine a strong analytical and conceptual mind with a pragmatic attitude. You are able to work independently in a dynamic and complex environment, taking the lead and inspiring your colleagues in going the extra mile. You possess a resilient personality, with both feet on the ground, qualifying you as an individual not easy to overlook. You see the big picture without missing the important details and you have experience with managing complex deliverables. If you recognize yourself in the above, then we are looking for you! Join our enthusiastic and committed team in developing the vacuum solutions for our next generation of EUV scanners and bring ASML’s vacuum competence to the next level!

Job Mission

The Vacuum Architect is responsible for the translation of the overall system design into a gas flow & vacuum architecture that secures the requirements for sustained transmission over the scanner optics lifetime and suppression of molecular and particle contamination, throughout the optical column and beyond. You create the budgets for flow & pressure, particle and molecular contamination. You define model and design validation tests on the scanner or on offline test setups and evaluate the measurement results to set the path forward and come up with new solutions that take us to the next level.

Where needed, you will negotiate with other projects to optimize the specifications and work out X-project solutions to complex problems. Next to your experience in gas flows you also have good knowledge of vacuum systems and components that enables you to make the right design choices to achieve the challenging targets for cleanliness and machine availability. You make sure that the architecture or subsystem is working as intended during the specification phase, together with your team.

Finally, with your expertise you contribute to the knowledge growth of our group, working together and coaching your team members.

Job Description

Main responsibilities:

  • Understand the mechanism of low pressure gas & flow in contamination suppression and particle transport
  • Be a critical partner to other projects to help them reach their targets where it comes to vacuum system aspects
  • Secure expert coverage of vacuum and sub-atmospheric gas flow aspects in the design process
  • Perform analyses and calculations to predict the functionality of the flow architecture or subsystems
  • Create budgets on gas flow, (partial) pressure and outgassing
  • Where necessary increase group competence by literature research, experimental testing or cooperation with external research partners
  • Negotiate, define, document and present the specifications of architecture or subsystem
  • Translate these specifications into conceptual designs and act as counterpart and guidance during the design process
  • Take care of the functional integration of the architecture or subsystem: prove, document and present its proper functioning with offline and machine tests
  • Troubleshoot issues related to the flow architecture, subsystem or module


Technical Master degree in Mechanical Engineering, Applied Physics, Chemical Engineering or a closely related field of study.


  • Thorough knowledge of gas flow transport phenomena
  • Solid theoretical and practical experience in vacuum systems and applications related to the field of vacuum and sub-atmospheric gas flows
  • Profound knowledge of vacuum equipment, experience with vacuum system design

Personal skills

  • Highly motivated team player with excellent social, coordination and communication skills
  • Align with team, challenge them and convince with sharp mind
  • Able to perform in highly dynamic environment
  • Ability to organize work effectively and having a systematic approach in problem solving
  • Ability to provide technical direction, motivate and convince a team of professionals
  • Pragmatic and result-oriented attitude
  • Strong presentation skills
  • Able to challenge suppliers
  • Strong communication skills and good command of the English language (both written and verbal)

Context of the position

ASML’s Development & Engineering (D&E) sector is responsible for the specification, design and integration of the ASML machines. In this sector, the Vacuum Architecture group specifies, designs and delivers vacuum & gas flow based EUV scanner solutions and controls to secure high and stable EUV transmission of the optical column while protecting the in-vacuum optics, reticles & wafers from molecular and particle contamination. For the NXE 3400 Vacuum Systems project we are looking for an experienced Vacuum Architect to strengthen the project team.
In this position you are responsible for the conceptualization, specification and functional integration ofthe EUV scanner vacuum architecture and/or its subsystems. You are the technical expert for an important part of ASML’s EUV scanner, interfacing with most of the scanner modules.

Other information

ASML creates the conditions that enable you to realize your full potential. We provide state-of-the-art facilities, opportunities to develop your talents, international career opportunities, a stimulating and inspiring environment, and most of all, the commitment of a company that recognizes and rewards outstanding performance.

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