30+ days ago - req14565

Graduation assignment: Design a force-feedback controlled cleaning head

Mechanical engineering


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Mechanical engineering, Physics


Are you a Master graduate student in Mechanical Development or Applied Physics with an interest in precision machine design and do you have a hands-on mentality? Then this graduation project could be interesting for you.

Job Mission

Chips are produced in a series of etching and deposition steps. The pattern that is etched is typically created using an ASML machine. In order to create nanometer structures, the position and local height of the wafer has to be controlled accurately. The wafer stage controls the wafer position in the scanner. The position of the wafer onto the wafer stage is maintained using a complex pattern of bumps on the wafer table. This assures a sub-nanometer placement stability and position stability, which must be maintained under varying thermal loads, air pressures and up to 100G stage accelerations. The shape and topology of these burls is critical in the wafer table performance over its lifetime.

Job Description

You will develop a new novel force-feedback controlled cleaning head with sub-mN resolution for use on several offline (and possibly inline) test rigs. Your cleaning head shall enable a soft cleaning stone landing, thus eliminating the risk of burl damage. In addition, your cleaning head will enable better local cleaning and improve spatial homogeneous cleaning.
In order to achieve this, you will:
• Perform a design study on the required specifications of your module;
• Create concepts and evaluate them against your target specifications;
• Optional: create a (simplified) test-setup to prove the validity of your chosen concept.
• Create a detailed design of your chosen concept that is ready for prototyping.


You are a Master student in Mechanical Engineering or Applied Physics with an interest in precision machine design. You have an hands-on mentality, are creative, curious, goal oriented and capable of working independently. You have good communication skills and apply critical thinking to challenge and improve the status quo. You are fluent in English, both verbally and in writing.

This is a Master graduation assignment with a duration of 5+ months for 5 days a week. The start date is as soon as possible.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?