30+ days ago - req14794

Graduation assignment: Improve the lifetime of wafer tables

Chemistry & materials science

Mechanical engineering


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Chemistry & materials science, Mechanical engineering, Physics


Are you a Master student with a strong interest in tribology or surface characterization? Then this assignment is interesting for you.

Job Mission

Chips are produced in a series of etching and deposition steps. The pattern that is etched is typically created using an ASML machine. In order to create nanometer structures, the position and local height of the wafer has to be controlled accurately. Products are built up with multiple layers on a wafer, where the position of the layers with respect to each other is critical. The stability and wear resistance of the wafer table, which supports the wafer, plays a crucial role in this. Properties like flatness and friction need to remain stable during the lifetime of the wafer table.

Job Description

You will be working in the Wafer Table Mechanical & Industrialization group to improve the lifetime of wafer tables. This can be achieved by inline flatness and roughness reconditioning. You will:
• Perform a material study how to effectively flatten wafer tables and regenerating roughness;
• Create a test setup;
• Perform tests to demonstrate the chosen solution(s).

The main deliverables are a set of recommendations and an implementation proposal for your optimal configuration.


You are a Master student in (Applied) Physics, Material Science, Chemical Engineering, Mechanical Engineering. A background in tribology or surface characterization is required and you have an interest in product development.
You are creative, curious, goal oriented and capable of working independently. You have good communication skills and apply critical thinking to challenge and improve the status quo. You are fluent in English, both verbally and in writing.

This is a Master graduation assignment with a duration of 6+ months, for 3 - 5 days a week. The start date is in September 2020.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?