14 days ago - req15160

Sr. Mechatronics Engineer

Research & development


Mechanical engineering

In a nutshell


San Jose - CA, US


Research & development


3-7 years



Job Category

Mechatronics, Mechanical engineering


ASML is one of the world’s leading manufacturers of lithography systems that help enable Moore’s Law and the creation of increasingly powerful and capable electronic devices. Our San Diego-based light source division, Cymer, is renowned for developing both deep ultraviolet (DUV) lithography light sources and next generation extreme ultraviolet (EUV) light sources.As the world’s leading semiconductor equipment manufacturer, ASML enables chipmakers to produce cheaper, speedier chips – and to produce them faster – thereby enabling all the technology you use today. The systems we produce integrate several large and sophisticated machines, themselves each a feat of engineering innovation, precision, and speed.

We are a multinational company with over 70 locations in 16 countries, headquartered in Veldhoven, the Netherlands. We have 18 office locations around the United States including main offices in Wilton, CT, Chandler, AZ, San Jose, CA and San Diego, CA (EUV laser source creation).

Hermes Microvision, Inc. (HMI), an ASML company, is a leading supplier of advanced E-beam inspection and pattern verification systems used for advanced semiconductor devices. HMI has multiple years of e-beam application experience and leadership in semiconductor factories, focused on high resolution and voltage contrast imaging. As part of ASML, HMI will boost ASML’s holistic lithographic portfolio of (i) lithography exposure systems, (ii) computational lithography and (iii) metrology. Between these three cornerstones ASML offers application products for process window enhancement, control and detection. We are located in the heart of San Jose and growing!

If you have a passion for technology and innovation you’ll want to check us out. Be a part of progress.

One Company, One Goal, Limitless Innovation. It's our people that make the difference.

Job Description

ASML-HMI Mechatronics group owns the dynamics and controls related work of the Scanning Electronic Microscopy (SEM) machines with nanometer wafer positioning. On this role, the engineer will focus on mechatronics work with wafer table and/or wafer stage for semiconductor equipment. Wafer table handles the wafer with clamping, grounding, detection, protection and anti-sticky issues, is the closest module to our working/inspection target – semiconductor wafer. Wafer table is installed on wafer stage short stoke moving plate which guarantees nanometer positioning accuracy.

The work scope will cover mechatronics work on wafer table/stage, from function level design with specification analysis, to mechanical/electrical detailed design, to hardware integration and all related testing, trouble shooting and function verifications with calibrations. The goal is to keep the technical skills from the users up-to-date to be able to deliver state-of-the-art designs, using a standardized mechatronics design way-of-working.As an Sr. Mechatronics Engineer [Wafer Table] at ASML, you will tackle new and exciting challenges each day, including but not limited:

  • Wafer table module function level design with specifications and mechanical drawing
  • Wafer clamping/grounding/detection function design, testing, verification, trouble shooting and analysis
  • Machine and material damage control design, implementation and testing with wafer table
  • Solve challenging issues on wafer table, e.g., sticky wafer, thick wafer grounding, bow wafer handling, etc.
  • Interface with different function clusters to integrate wafer table and realize desired performance.


  • BS/MS/PhD in mechatronics, mechanical, or electrical engineering.New and Recent College grads will also be considered.


  • Minimum of 2 years relevant and work related experience.Less experience with higher education.
  • Semiconductor wafer table related industrial work experience is preferred
  • Relevant work experience on mechatronics or related domain engineer in industry
  • Strong background on mechatronics for mechanical equipment or precision motion systems
  • Solid skills of using SolidWorks / NX and MATLAB preferred. FEA skill using ANSYS / COMSOL is a good plus
  • Work experience/knowledge in semiconductor equipment is also a plus
  • Analytic, abstract thinking, good communication skills, initiative, independent, planning and prioritizing, sharing knowledge, stress tolerance and teamwork.
  • Excellent English written and verbal communication and presentation skills

Other information


The physical demands described here are representative of those that must be met by an employee to successfully perform the essential functions of this job. Reasonable accommodations may be made to enable individuals with disabilities to perform the essential functions.

  • While performing the duties of this job, the employee routinely is required to sit; walk; talk; hear; use hands to keyboard, finger, handle, and feel; stoop, kneel, crouch, twist, reach, and stretch.
  • The employee is occasionally required to move around the campus.
  • The employee may occasionally lift and/or move up to 50 pounds.
  • May require travel dependent on business needs.
  • Specific vision abilities required by this job include close vision, color vision, peripheral vision, depth perception, and ability to adjust focus.
  • Can work under deadlines.
  • The environment generally is moderate in temperature and noise level.
  • Must be able to read and interpret data, information, and documents.
  • Can observe and respond to people and situations and interact with others encountered in the course of work.
  • Can learn and apply new information or skills.
  • Responsibilities may include periodic travel to regional and overseas sites for product technical support and special support projects.
  • Work may include onsite technical support involving heavy lifting of equipment & modules.
  • Position may require technical work activity in a clean-room production environment and/or laboratory setting.
  • The environment generally is moderate in temperature and noise level.
  • Occasionally may be exposed to loud noise bursts and may be exposed to toxic gases (fluorine).
  • Position may require working in small, confined spaces.

We offer competitive salaries and benefits including medical, dental, vision, 401(K), and FSAs.

We are committed to leveraging the diverse backgrounds, perspectives, and experiences of our workforce to create opportunities for our people and the business.

EOE AA M/F/Veteran/Disability