30+ days ago - req16354

Graduation assignment: Apply optimization techniques to determine alignment mark layouts

Computer science & software engineering

Data science


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Computer science & software engineering, Data science, Mathematics


Are you a Master graduation student with a strong interest in optimization and with a broad knowledge of mathematics? Do you have have a proven record in statistics? Then this graduation project could be interesting for you.

Job Mission

ASML produces lithographic scanners. These machines manipulate silicon wafers by printing on them images on top of each other. The result of this stack of images are integrated circuits (IC). In order to have working IC the different images have to be aligned with nanometer precision. This is achieved by reading out markers printed on specific locations of the wafers before each image is printed. During the process of printing the various images of the IC, the wafers undergo all kinds of deformation. In addition, the wafers are also displaced when loading into the machine. This makes the positioning of the marks (layout) crucial to achieve the desired alignment precision. Additionally, reading out these marks is a time consuming process which could be optimized by reading out less marks with minimal performance degradation.

Job Description

You will be asked to apply various optimization techniques to determine alignment mark layouts for the ASML scanners. The aim is to reduce the number of marks which are read out with minimal performance degradation. The techniques to be explored vary from applied statistics (like analysis of variance), to algorithms (like Evolutionary Algorithms, Bayesian optimization), to applied mathematics. You will be working in a team of data scientists and you are expected to be able to carry on tasks by yourself.


You are a Master graduation student in Computer Science, applied Mathematics or applied Statistics. A strong interest in optimization and a broad knowledge of mathematics is a must together with a proven record of applications of optimization techniques andstatistics. The candidate must be able to code in Matlab. The English language is required, both written and verbally.

This is a Master graduation internship for 5 days a week with duration of a minimum 6 months. The start date is in September 2020.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?