30+ days ago - req16313

Internship: Investigate and optimize parts cleanliness for EUV lithography

Chemistry & materials science


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Chemistry & materials science, Physics


Are you a Chemistry student with a strong interest in working on a chemical process which is new for the semiconductor industry? Then this graduation project is interesting for you.

Job Mission

The photomask is defining the pattern layer in integrated circuit fabrication. It is fed into a photolithography EUV NXE Step-and-Scan systems that are built in an ultraclean environment. However, it is challenging to prevent addition of any particle defects during the assembly process - there should be zero added defects less than 2000 nm (for comparison, a red blood cell is about 8000 nm).

Job Description

Your task would be to investigate and optimize the cleaning capabilities for sub-micron particles by exploring alternative cleaning techniques which enables lower particle contamination limits in combination with advanced metrology techniques. You will have ownership for the following deliverables:
1. Support determining the limitations of the existing cleaning techniques;
2. Work on the development of an optimized cleaning technique(s);
3. Investigate the material compatibility with the proposed cleaning process;
4. Document the full process, way of working and results.


We are looking for a Bachelor or Master student in Material Science, Chemistry or Applied Physics with a strong drive and passion for technology and chemical knowledge. A must is that you have a proactive and progressive mindset and are able to work well within a team environment. Furthermore, you have affinity with material analysis. Interest in programming and machine learning is a plus. The English language is required.

This is a graduation internship for 5 days a week with duration of a minimum 6 months. The start date is in September 2020.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?