15 days ago - req16916

Internship (DELFT): Redesign of a submicron accurate assembly tool for stacking MEMS elements

Mechanical engineering


Optical engineering

In a nutshell


Delft, Netherlands


No experience (Student)



Job Category

Mechanical engineering, Physics, Optical engineering


Are you a Master student in Mechanical Engineering or Applied Physics? do you have affinity with micro-mechanics and optics? Then this internship assignment could be interesting for you.

Job Mission

In the Delft office of ASML, we are developing a multi-beam electron microscope for in-line wafer inspection. A key module in this electron microscope is the MEMS module. The core of this module is a stack of MEMS elements that focus and deflect the electron beams. Typically, the elements comprising the stack require submicron accurate alignment w.r.t. each other. As a parallel path next to the current assembly method we would like to explore the option of redesigning an existing tool (called stacktool) that was used in an earlier project to assemble our MEMS stack.

Job Description

You will be a member of our Agile Scrum team. You will be responsible for making a concept redesign of the stacktool. Your work will include gathering requirements, make trade-offs for various subsystems and combining this into an overall concept design. If time allows, you can help us starting off the detailed design phase. You will be guided primarily by the architect of the stacktool.


You are an MSc (WO) student in Mechanical Engineering or Applied Physics. You have affinity with micro-mechanics and optics combined with a mindset for simple solutions. Furthermore, you have good communication skills in the English language, both written and verbally. Finally, you are a pro-active person: you don’t wait for answers, you go and get answers.

This is a Master apprentice internship or graduation assignment for 5 days a week with duration of a minimum 4 months. The start date is in September 2020.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?