10 days ago - req17538

Graduation assignment: Using Hybrid Integrator-Gain Switching Control for Piezo Stepper


Mechanical engineering

Electrical engineering

In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Mechatronics, Mechanical engineering, Electrical engineering


Are you a Master student with a background in hybrid or non-linear control engineering? Then this graduation assignment could be interesting for you.

Job Mission

The Optical Column Mechatronics group is part of the Development and Engineering department of ASML. This group develops new products to fill in technological gaps in the future roadmap of lithography and the lithography market and helps support costumers with complex field issues. Focus of the team is on Mechatronics systems that reduce the aberrations in the DUV Lens column using a variety of actuation principles e.g. piezo mechanical systems, pneumatic and thermal actuation.

Job Description

One of the main limiting factor of linear control is known as the waterbed effect. In this work, you will be aiming to beat the waterbed effect by using Hybrid Integrator-Gain Switching (HIGS) control to push the performance limits of a scanning lens manipulator. In that sense, the work is to investigate this control strategy, and deliver a proof of concept of a HIGS controller that provides:
• sufficiently low frequency disturbance rejection properties during wafer exposure;
• limited overshoot and improved settling behavior to minimize the transient effects after a step input.

After a literature study about piezo stepper systems and non-linear control approaches, a HIGS controller concept will be derived which suits best to the scanning lens manipulator. The controller will be designed and simulated on ASML Simulink models. Furthermore, one of the aims is to evaluate the controller performance on a real-time controlled experimental setup with the scanning lens.


You are a master student in Systems and Control, Mechatronics or you have a strong control engineering background from Electrical or Mechanical Engineering. You have experience with MATLAB, Simulink, hybrid or non-linear control. In addition you have curiosity for high-tech systems and interest in performance optimization. You have good analytic skills and excellent communication skills in English.

This is a Master graduation project for 5 days a week with a duration of a minimum 6 months and preferably 9 months. The start date is as of September 2020.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?