30+ days ago - req22487

Senior Lithography Software Architect

Research & development

Computer science & software engineering

In a nutshell


San Jose - CA, US


Research & development


3-7 years



Job Category

Computer science & software engineering


ASML US, including its affiliates and subsidiaries, bring together the most creative minds in science and technology to develop lithography machines that are key to producing faster, cheaper, more energy-efficient microchips. We design, develop, integrate, market and service these advanced machines, which enable our customers - the world’s leading chipmakers - to reduce the size and increase the functionality of their microchips, which in turn leads to smaller, more powerful consumer electronics. Our headquarters are in Veldhoven, Netherlands, and we have 18 office locations around the United States including main offices in Chandler, Arizona, San Jose and San Diego, California, Wilton, Connecticut, and Hillsboro, Oregon.

Job Mission

The mission of Senior/Principal Lithography Software architect is to be successful in driving and enabling our E-Beam Inspection tooland Software product development for Metrology Application. As an in-depth domain knowledge in lithography process, metrology applications and understanding the software design, you will act as the technical interface for Program and System Engineer as a product-level software architect, between Application engineers and software developers as functional-level architect, specialized in lithography process, metrology applications’ flow, software interface design and software functional requirement analysis.

To focus on metrology software product design , you need to communicate with Program and System engineer to define Metrology product functionalities and Software application technical roadmap planning guidance. To support functional design and realize the software infrastructure and metrology feature development for the ASML-HMI E-Beam metrology product.

This position may require access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require the Company to proceed with candidates who are immediately eligible to access controlled technology.

Job Description

  • Responsible for software design on metrology application by engaging lithography and patterning process, material characterization, metrology use cases and integrated process flow development into EBI tool.
  • Utilize best practice and knowledge to solve complex Lithography problems and takes a new perspective using EBI as metrology solutions.
  • Identify business requirements from product managers or stakeholders for metrology software development.
  • Interact with system/hardware/application engineers and developers to envision and create high level software architecture and functional models for new generations of E-beam inspection and metrology tools.
  • Optimize software on data migration, analytics and compilation of metrology application.
  • Break down application flow, define software building blocks to module software functionality and development tasks.
  • Review lithography process, metrology application user flow, application software design and metrology result to improve product value.
  • implement new methodologies, troubleshoot, perform root cause analysis and resolve process and metrology application issues.
  • Write professional specification and design documents.
  • Define unified development standards and input for tool and environment selection.
  • Plan for software evolutionary paths for metrology application and new technology insertion.
  • Identify risk and manage risk mitigation strategies associated with the architecture.


  • MS or PhD in physical sciences, engineering or a related field
  • More than 5 years’ experience on semiconductor process or related field, especially related to lithography and patterning process, CD-SEM metrology, data analysis in a development or manufacturing environment preferred


  • 8+ years of experience of relevant, work related experience in lithography process, metrology applications, with inclinations in software programming or design.
  • Expert in lithography and patterning process development activities on advanced patterning processes, and improve process metrics including: CDU, process window, yield, and defects.
  • General knowledge of appropriate materials, components and technologies used in the semiconductor industry
  • Experience in EBI system or SEM imaging for lithography and patterning process.
  • Experience in metrology application software and data analytics tool.
  • with programming language or scripting language such as C#, C++, Python, Matlab, etc.
  • Good Understanding of software development process and software life cycle
  • Excellent oral and written communication skills
  • Knowledge of image processing, real time system, or semiconductor equipment control is a plus

Personal skills

  • Excellent communication skills. Demonstrate open, clear, concise and professional communication. Ability to speak up in a respectful manner
  • Work independently or as part of a team and follow through on assignments with minimal supervision.
  • Self-starter, result driven-demonstrate ownership and accountability, pragmatic
  • Can observe and respond to people and situations and interact with others encountered in the course of work.
  • Can learn and apply new information or skills.
  • Must be able to read and interpret data, information, and documents.
  • Strong customer focus and commitment to customer satisfaction through prioritization, quality, efficiency and professionalism.
  • Ability to complete assignments with attention to detail and high degree of accuracy.
  • Proven ability to perform effectively in a demanding environment with changing workloads.
  • Result driven-demonstrate ownership and accountability.
  • Identifies bottlenecks and drives improvements.
  • Work independently or as part of a team and follow through on assignments with minimal supervision.
  • Demonstrate open, clear, concise and professional communication.
  • Ability to establish and maintain cooperative working relationships with co-workers and customer.
  • Work according to a strict set of procedures within the provided timelines.

Other information

  • Software Architect responsible for creates budgets and definitions for business driver at system/product level;
  • Performs verification of SDS content, design software EPS/EDS.
  • Serves as consultant to PM, PDM, Program SE.
  • Align and communication with external stakeholders.
  • Balances between resource, project plan, functionalities and other business drivers.
  • Decision taking on own expertise or on high impact,
  • Cover multi-disciplinary subjects

May require travel 10% of time

EOE AA M/F/Veteran/Disability