14 days ago - req22880

Chemistry | Material Science | Physics Internship: Exploring new characterization methods of sub-µm

Chemistry & materials science


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Chemistry & materials science, Physics


Are you a Master student in Chemistry, Material Science or Physics? Do you enjoy lab work? Are you interested in conducting analysis on new technology? Then this assignment could be interesting for you!

Job Mission

The department of defectivity focuses on studying the root cause of defects (contaminant particles or damages) with the goal of containing and reducing the number of defects found on the wafer and reticle. The challenge we face is correctly characterizing the particle material to identify the root-cause of the particle. Currently, we use EDX to find the material composition, but this gives very limited data when trying to separate different polymers from each other. Hybrid techniques like AFM-IR look very promising as particles below 1 micron can be analyzed in great detail. Currently, AFM-IR machines have not been adapted for ASML test cases: studying particles on 300mm round Si wafers or 150mm square reticles. We typically scan these large surfaces to detect and locate the defects with an inspection tool and subsequently a separate tool is used for material analysis. Our biggest concern is after inspection and transferring this wafer/reticle to an AFM-IR setup to find back the defects with the AFM probe as scanning with AFM is very slow.

Job Description

In this internship you will determine if it is feasible to find defects back on a bare 300mm Si wafer by AFM probe.
Your tasks will be understanding in detail the capabilities of the 300mm wafer AFM probes currently on the market and setting up an experiment to determine:

  • How long does it take on average to search for a particle defect?
  • What is the % of defects that can successfully found back by AFM?

You will prepare relevant wafer samples, perform experiments, and analyze experimental data. In order to perform all the aforementioned, collaboration with tool suppliers might be required.


You are a Master student with a background in Chemistry, Material Science or Physics. You have a strong affinity with metrology tools to characterize materials (like AFM and FT-IR) and you enjoy lab work. Moreover, you have strong communication skills, since you will have to collaborate closely with suppliers, and you are a team player. In addition, you are an analytical thinker.

This is an apprentice/graduation internship for 4-5 days a week with duration of 5 - 9 months.

You will receive a feedback about your application from 11th of March.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?