17 days ago - req23646

Development engineer wafer particle contamination EUV

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category





Our challenge is to develop, integrate and qualify the EUV systems according to customer specifications, and deliver within time and budget. The Defectivity Optical Column Conditioning Scanner department is part of the sector Development & Engineering. Do you enjoy using your creativity to the develop a complex system, do you like solving multi-disciplinary problems, do you like teamwork, sharing your vision, and interacting and working together with many different disciplines? If so you will enjoy ASML – it will be a great opportunity for your professional development and personal growth.

Job Mission

Each EUV system as a whole must be such that the particle levels on the reticle, wafers, optics and sensors are according to specification. During the assembly and integration process of the systems, as well as at customers, issues arise and need to be solved. On top of this, the future systems require ever improving performance.

Job Description

The particle contamination control engineer must be able to collect and process system and test data, as well as the required system configuration data, to monitor system performance, to early identify issues, and to pin-point issue areas or areas of improvement, as well as create and explore proposals for developments and improvements. In order to be able to do so, the engineer must have, or be able to learn, thorough system and module knowledge. Combined with knowledge of particle generation processes (materials, coatings, vacuum), particle transport processes (gas flows, inertia) and particle deposition processes (adhesion, bonding) and mixed with common sense, there will be a great challenge to force design changes and design optimizations into work packages and support their execution by the required projects. A combination of these skills will result in the ability of the engineer to drive and support the improvement of the system’s performance and system issue solving, and with this the engineer will make a valuable contributions to our projects and customers.


Education level Masters in physics, mechanical or chemical engineering.


  • Industrial experience in multi-disciplinary projects
  • Can work in a mix of troubleshooting a complex system in parallel with running investigations to make it perform better (hands-on combined with analytical work)
  • Is familiar with “contamination control”, preferably within ASML
  • Affinity with materials analysis is a plus
  • Experience with customer contact.

Personal skills

  • Strong analytical ability with a pragmatic attitude
  • Curious, willing to learn new things
  • Can filter root-causes out of complex datasets, and explain it to the other engineers in the team
  • Can work independently in a dynamic, explorative environment, as well as in a team
  • Highly committed and flexible (sometimes working outside office hours, changing requirements and boundary conditions)
  • Robust personality is a must.

Context of the position

The group EUV Defectivity Wafer & Pellicle is responsible for optimizing the system’s performance by providing the means and methods to prevent, detect, analyze, predict, control and eliminate particle contamination sources in the scanner. Furthermore, the group must ensure that the designs of the tools and systems are industrializeable.

Other information

In this role you have to be willing to travel, several times per year (USA, Asia).

ASML creates the conditions that enable you to realize your full potential. We provide state-of-the-art facilities, opportunities to develop your talents, international career opportunities, a stimulating and inspiring environment, and most of all, the commitment of a company that recognizes and rewards outstanding performance.

Please add your complete & recent CV and motivation letter for this position to your application.
We can't process your application without the above mentioned documents.

You can apply for this job using the button: “Apply now”.
Applications sent by email can’t be processed.

Learn more about this job