27 days ago - req23660

Mathematics | Physics Internship: Parameters optimization for image quality improvements

Research & development



Optical engineering

In a nutshell


Veldhoven, Netherlands


Research & development


No experience (Student)



Job Category

Mathematics, Physics, Optical engineering


Are you a Master student and skilled in MATLAB, Data Analysis and Optimization Techniques? Are you looking for an internship as of May this year? Then this assignment could be interesting for you!

Job Mission

For the calibration of EUV machines, we use different types of Lens Models, which need to balance between speed, stability, and offer optimal optical performance. However, due to the limited set of manipulators and the stability requirements of systems, we cannot correct for all kinds of aberration effects. To meet the desired requirements, we have to use a set of weight parameters to balance between effects (e.g., overlay vs focus). Determining these parameters is difficult since the number of parameters is large (hundreds) and the aberration effects are conflicting.

Job Description

As an intern working within the EUV projection team, you will be responsible for investigating and proposing proper methods to optimize Lens Models’ parameters in order to enable better calibration of the EUV projection optical system, especially for NXE systems.

The assignment is divided into the following stages:
• Familiarize with context, collect and analyze available data of NXE machines, specifically current parameter tuning strategies;
• Investigate the performance of current models and current set of parameters on the available data;
• Implement and test the alternative procedures based on simulations.
You will be integrated in the EUV projection optical performance team and have interactions with DUV projection and sensor and metrology departments. You will report directly to the team leader and the mentor.


• You are a Master student in Mathematics, Physics, Optics, or a related field.
• You are skilled in MATLAB, Data Analysis and have good knowledge of optimization techniques (e.g. evolutionary algorithms, nonlinear optimization or gradient-based optimization)
• You are analytical-oriented, autonomous and have good communication skills in English.
• You are enrolled as a student during the entire duration of the internship.

This is a Master apprentice internship or graduation project for 5 days a week with a duration of a minimum 6 months. The preferred start date is of May 2021.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?