30+ days ago - req26453

MEMS expert

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category





ASML is relentlessly driving the semiconductor industry’s ongoing quest for producing faster, smarter and more energy efficient chips. We are a young, dynamic, international and highly skilled workforce creating, with strong support of our suppliers, the lithographic tools the industry needs to achieve its goals.
At the moment we are at the start of developing a new technology building block to support future Illuminators, i.e. MEMS technology. In this role you will be at the forefront of a new platform development. We are looking for a MEMS expert willing to take the challenge to design, test and integrate, together with the project teams at ASML and our technology development partners, the new technology in our EUV Illuminators. You will be part of the EUV Illumination group responsible to transfer the EUV light onto the reticle image in the EUV scanners by means of advanced optical manipulations and corrections.

Job Mission

As a MEMS expert both in the EUV Illumination group you will be responsible for the main technical decisions on design requirements, development, integration and qualification of the MEMS technology. You will work in a fast paced and multi-disciplinary environment as part of the Illumination team. Next to the multi-disciplinary internal interaction there will be a lot of interaction with the external MEMS development and production partners.
Besides the technical aspects of the design you also have to incorporate important aspects related to cost, reliability, availability and serviceability. Your responsibility is to take the project deliverables and drive that towards completion.
This includes documentation, implementation, qualification & integration. In order to fulfill this role you need to align within in the team on technical aspects, scope, planning and progress. Also, you need to collaborate with different competences and sectors (systems engineering, marketing and customer support) both within ASML as well as with the development and production partners.

Job Description

  • Lead technical interface to development/production partners on MEMS technology
  • Prepare usage of MEMS technology as a building block to support future Illuminators
  • Provide MEMS specific requirements both for technology development and validation
  • Contribute to keeping the specifications within budgets in close collaboration with System Function Architect


MSc or PhD in physics or optics, electronics, mechatronics, or related.


Experience (>5 years) in a multidisciplinary environment related to design and integration of complex microsystems is
needed, with a focus on / clear contributions to MEMS technology development and industrialization, preferably for
optical systems and applications of optical systems. Personal skills

Personal skills

  • MEMS technology expert knowledge, ready to set direction
  • Hands-on MEMS industrialization experience
  • Team player with ability to build network towards other parts of the ASML organization.
  • Ability to think on a functional level and in design details.
  • Able to provide architectural perspective and overview
  • Ability to switch between complex matters and high-level conclusions and convey these in an understandable fashion.
  • Pragmatic attitude

Context of the position

Within ASML, the Sector Development and Engineering (D&E) is responsible for the planning, development, and delivery of integrated solutions that meet business requirements. This responsibility also includes the specification of trade-offs across sectors. The department DE EUV Optical Column is responsible for delivery of the projection, illumination, dose control, and EUV light collection functions for EUV. The department supplies resources, means and methods and technology to ensure these deliveries in all the different product phases.
The holder of this position is reporting to the ED EUV DE OC Illumination Group Leader

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