22 days ago - req27147

Mechatronics | Physics Internship: Maximizing the optical performance of EUV machines



Mechanical engineering

In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Mechatronics, Physics, Mechanical engineering


Are you a bachelor student with a background in Mechatronics, Physics or Mechanical Engineering? Are you interested in joining a team that is working on solving the challenges in the thermal control domain that will impact future generation machines? Then this internship could be interesting to you!

Background Information

EUV machines are on top of driving the modern semiconductor technology in manufacturing faster, better performing and more energy efficient chips.
For EUV machines, there is a constant drive to further optimization of the optical performance.
Your task will be to contribute in improving one of the most advanced machines in the world by improving the thermal control calibration strategies to maximize optical performance.

You will join the EUV Thermal Design and Management team and you will contribute to solving the challenges in the thermal control domain that will impact future generation machines.

Your Assignment

Future EUV scanners will be equipped with novel thermal control solutions which will improve imaging performance well below sub-nanometer level.
Operation of such heaters require calibration of errors and uncertainties to reach very demanding requirements.
The main objective of your internship is to explore and asses feasibility of calibration methods which will enable highly accurate feed forward control with minimal EUVmachine production loss.
You will be reporting to a team leader and a mentor who will support you during your internship.

Your Profile

  • You are a master student with educational background in Mechatronics, Physics, Mechanical Engineering or other related technical area.
  • You are interest in gaining work experience, this is an apprentice internship.
  • You have a strong background in dynamic systems (system theory).
  • You have basic understanding in optimization, system identification methods, distributed parameter systems and Finite Element Method (FEM).
  • Having experience with model reduction and Model Predictive Control (MPC) are considered a plus.
  • You are available for 5 days a week with a duration of 3-4 months.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?