16 days ago - req27300

Applied Physics Internship: High Velocity Rarefied Gas Heat Load Estimation Model


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category



Are you a master student in Applied Physics, who is graduating in a field compatible with fluid dynamics? Does the design of an analytical or empirical model for estimating slip-shear heat load early in the machine design sounds interesting? Then this internship could be interesting to you!

Background Information

The latest generation of lithography machines uses light in the extreme ultra violet range. Since light of this wavelength (13.5 nm) is absorbed by any optical medium, reflective optics in a vacuum are used. Any dust particle can potentially ruin the light patterns that are generated in the machines. Therefore, high velocity jets of low pressure gas are used to push contamination away from sensitive modules. But at the same time the pressure needs to be as low as possible allow for maximal EUV transmission.
This leads to a slip-flow condition in the rarified gas regime: the gas flow is now interacting directly with the surface itself and there is no more boundary layer with zero wall velocity. This enhances the interaction of the gas with the surface, such that even at low pressures appreciable amounts of heat can be transferred to the surfaces. Since the next generation of lithography machines needs precision of submodules to be in the order of 10 picometer, even small thermal effects are relevant to design evaluation and need to be estimated to arrive at the desired performance.

Your Assignment

In past internship assignments several measurements and DSMC / CFD analyses have been done. In this internship you will come to an analytical or empirical model for estimating slip-shear heat load early in the machine design. You will:

  • Investigate the available experimental and simulation data, perform literature research
  • Analyze and compare to the results, try to match the results to a theoretical frame work or scaling law.
  • If needed, perform additional measurements and/or CFD / DSMC simulations
  • Finalize the model, document and present it such that it can be applied for machine design.

You’ll be working in close collaboration with experienced engineers on answering questions currentlyblocking the design of the next generation lithography tools.

Your Profile

  • You are a master student in Applied Physics, who is graduating in a field compatible with fluid dynamics.
  • You are looking to do your graduation project and you are available for 5 days a week with a minimum duration of 6 months.
  • You are autonomous and have good communication skills in English.
  • The start date is as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?

Learn more about this job