D&E EUV High NA Projection – Diagnostics tooling Design

Research & development


Optical engineering

Mechanical engineering

In a nutshell


Veldhoven, Netherlands


Research & development


0-2 years



Job Category

Physics, Optical engineering, Mechanical engineering



Published: 30+ days ago Job ID: req27740


ASML is relentlessly driving the semiconductor industry’s ongoing quest for producing faster, smarter and more energy efficient chips. We are a young, dynamic, international and highly skilled workforce, creating, with strong support of our suppliers, the lithographic tools the industry needs to achieve its goals.
Are you looking for a challenge to create diagnostics software develop models and optimization techniques for high-performance complex optical modules? Then you will enjoy this position in the EUV optical column projection team. You will be part of the EUV projection group responsible to transfer and de-magnify the reticle image onto the wafer in the EUV scanners by means of advanced optical manipulations and corrections.

Job Mission

As Diagnostics tooling Design Engineer in the EUV High NA Projection group you will be responsible for thedevelopment of diagnostics tooling that will enable us to better understand the performance of the system. The challenge is to translate requirements from our stakeholders and available diagnostics data into relevant visualizations and analysis results. This also requires integration of correction mechanisms to enable what-if analysis. You will work in a fast paced and multi-disciplinary environment as part of a project team.
Your responsibility is to take ownership of a project deliverable and drive that towards completion. This includes specification, modeling, algorithm development, documentation, qualification & integration. Also, you need to collaborate with different competences and sectors (systems engineering, marketing, metrology and customer support) within ASML. Using your technical knowledge, analytical thinking and people skills, you will work closely together with the project team and interfacing projects and sectors.

Job Description

You are part of a team of engineers who work together on mirror models and optimization algorithms in the projection modules. The job consists of:
•Developing diagnostics tooling which enable interpretation of testing and calibration procedures
•Help our stakeholders to interpret the modeled results
•Combining algorithm design with requirement engineering and integration support.
•Close collaborating with other projects including scanner metrology, stages, imaging, integration and with suppliers.
•Support the upcoming integration and qualification of the high NA EUV platform.


MSc in mathematics or Physics with knowledge on numerical techniques or optimization techniques, preferably with knowledge of optical systems.


Experience with working in teams in a multi-disciplinary environment is needed. Work experience in an industrial environment is preferred. Demonstrated affinity to create diagnostics software. Knowledge of optics and/or lithography is needed.

Personal skills

• Strong analytical skills and drive for quality.
• Strong knowledge of modeling and optimization techniques.
• Skilled in use of Matlab / programming / Software engineering.
• Affinity with working in multidisciplinary environment related to complex systems.
• Affinity with optical and software disciplines.
• Ability to think on a functional level and in design details.
• Ability to switch between complex matters and high-level conclusions, and to convey these in an understandable fashion.
• Good communicational skills.
• Team player with ability to build network towards other parts of the ASML organization.
• Self-propelling, showing initiative and drive, pragmatic attitude.
• Flexible, result driven and committed.

Context of the position

Within ASML, the Sector Development and Engineering (D&E) is responsible for the planning, development, and delivery of integrated solutions that meet business requirements. This responsibility also includes the specification of trade-offs across sectors.

The department DE EUV Optical Column is responsible for delivery of the projection, illumination, dose control, and EUV light collection functions for the EUV machines. The department develops technical solutions, means and methods and competences to ensure these deliveries in all the different product phases.

The holder of this position is reporting to the High NA Projection Group Leader.

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