3 days ago - req28502

Physics Graduation Internship: Spectral engineering for optical overlay nanometrology

Research & development

Optical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


No experience (Student)



Job Category

Optical engineering, Physics




Are you a Physics student with a focus on Optics? Are you skilled in programming in MATLAB? Then this graduation project in our Research & Development department could be interesting for you!

Background Information

The control of overlay, which is defined as the alignment error between two semiconductor layers, plays a vital role in semiconductor manufacturing. Overlay is often measured optically by detecting the optical response from a metrology target in customer’s wafers. With the continuous shrinkage of the size of a transistor on a chip, overlay accuracy budget becomes increasingly tighter (sub-nanometer). To achieve the optimum overlay metrology performance, multiple wavelengths are often used in the overlay detection.

Your Assignment

In this assignment, you will investigate new ideas of using multiple wavelengths in overlay optical detection. Methods of using a tailored spectrum to help improving overlay performance against detection imperfections will be investigated both numerically (e.g. performing simulations) and experimentally (e.g. data analysis).

This assignment requires to understand ASML’s state-of-art simulation models and data analysis tooling at the level that you are able to modify it. Therefore, physics background with a focus on optics (imaging) and strong skills in programing (Matlab) are required.

This assignment will be carried out in ASML Research department. You will work at the cutting edge of technology, interact with various experts from ASML R&D, and experience the difference between industry R&D and academia research.

Your Profile

• You have an educational background in Physics (optics, photonics, semiconductor);
• You have strong simulation expertise (MATLAB);
• You have strong analytical skills (Data Analysis);
• You are communicative and have good presentation skills;
• You are a quick learner and team player;
• You are flexible, result-driven, committed and self-initiating.

This is a Master graduation internship for 5 days a week with a duration of 12 (minimum 9) months. The start date is as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance based on your educational level and number of days per week, plus a possible housing or travel allowance. More information on the allowances can be found on our website. In addition you will get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the applications to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard. At ASML we are always pushing technology further.

Students: Getting ready for the real-world
Teamwork is key within ASML. Our R&D team is more than 5,500 people strong and worldwide we form one big team with over 25,000 employees. These colleagues have 123 different nationalities and work at our major sites on three continents.

Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule. In this inspiring environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world and get a feel for that excites you most. Use your education, gain real-life working experience and explore the world of high-tech – all at the same time.

How will you be part of progress?