19 days ago - req29373

Research Scientist – Plasma Physics

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category



At ASML Research, everyone is part of a multidisciplinary team. Physicists, data scientists, chemical engineers, metrology experts and more – all working together in different teams to take on a particular challenge. Each team member brings a different set of skills to attack technical challenges from different angles. The result? Incredibly imaginative breakthroughs at the cutting edge of engineering.

ASML Research is now looking for an Expert in plasma physics to strengthen our team of research scientists investigating plasma and its effects on Extreme Ultraviolet (EUV) scanner performance.

Job Mission

You will be part of a team that investigates the plasma generated by interaction between EUV light and gas present inside the scanners. There are complex interaction between different plasma species, surfaces and contaminants that need to be understood in order to more accurately predict the performance of EUV scanners.

Your responsibility will be to perform and interpret experiments on EUV and plasma generating tools. You will become the expert for understanding interactions in the plasma and between plasma and surfaces of different materials and compositions and translate this knowledge to operational scanner conditions.

Job Description

Focus area will be EUV induced plasma in a low pressure hydrogen environment in combination with material interfaces.
- Perform experiments in complex plasma and EUV setups.
- Interpret results using existing theory and develop new theory where needed.
- Work closely with other scientists on theory, experiments and numerical models to understand the plasma in EUV scanners and predict performance related to this plasma.
- Come up with means and methods to improve performance.
- Share your knowledge effectively with the members of the program and department.
- Work with experts from Development & Engineering and System Engineering to define and maintain scanner lifetime and contamination roadmaps.


- A PhD in Physics, Applied Physics or related field.
- Expert knowledge on Plasma Physics and/or surface science.


Minimum of 5 years experience in experimental plasma physics or related discipline.

Personal skills

- Ability to work independently in a dynamic explorative environment.
- Ability to effectively assess a complex problem on the different physical scale levels from meters to nanometers .
- Resilient and firm in challenging situations.
- Strong analytical ability with a pragmatic attitude.
- Critical attitude.
- Good communicational skills and good knowledge of English.
- Able to work in a multidisciplinary team and effectively transfer knowledge to others.

Context of the position

The holder of the position reports to the Group lead Light Sources & Plasma Physics in the Research Department. Operational activities are within multidisciplinary research projects related to Pellicle and Scanner Lifetime.

Other information

This position may require access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. §730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Keywords: Plasma physics, Research

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