4 days ago - req29617

Product Owner Metrology

Research & development


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category





Is leading a team solving complex engineering problems your passion? Does working in a multi-cultural environment make you spin? Does contributing to world’s most advanced lithography machines make you feel proud? Then this might be the right opportunity for you.

Job Mission

As a part of ASML’s Metrology department, you will provide the software solutions that realize the metrology system functions, producing sub-nm measurement and control accuracy. As a product owner, your mission is to obtain the required results that are allocated to the team.

Job Description

ASML’s lithography systems deliver nanometer accuracy at high productivity. The required accuracy level cannot be achieved by hardware and mechatronics solutions only.At system level, imperfections of the subsystems need to be measured and corrected. The Metrology Functional Group creates mathematical models describing the lithography machine and its imperfections. The parameters of these models are calibrated using several sensors present in the machine. The calibrations of the machine can be done offline in a dedicated calibration test, or inline while running production. Afterwards, the calibrated parameters are used to control the machine in such a manner that the inaccuracies are corrected.

Solutions of the Metrology Functional Group are implemented in software by the Metrology Software Department.The Product Owner is responsible for the realization of the solutions in software. He/she creates and maintains the team schedule, tracks and reports on deliverable progress, directs and coaches the team members, and builds a strong team. The goal of the team is to design, realize and integrate high-quality software engineering solutions, allowing fast and efficient delivery of complex metrology functions.He/she reports to project leads.


MSc, PDEng or PhD in computer science, software engineering, system engineering, mathematics, physics, or equivalent


At least five years of development experience in a technical product development context is required. Additionally, 2 years of technical team leader experience in a team of around 5 to 10 people is a pre.

Personal skills

ASML is a highly dynamic environment, which requires you to be a good communicator, team player, to take initiative and to be result oriented.
As a product owner we expect you to show leadership, and influence your stakeholders to deploy software architecture changes and development methods.

Context of the position

This position is within the Imaging Metrology group in EV-EUV-DE-Illumination & Control.

Other information

Keywords: Major Deliverable Owner, Team lead, Management, Project Management, Software Engineering, Lithography, Mathematics, Physics, Electronics, Computer Science.

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