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Chemistry | Physics Internship: Explore new characterization methods of sub-µm

Chemistry & materials science


In a nutshell


Veldhoven, Netherlands


No experience (Student)



Job Category

Chemistry & materials science, Physics


Are you a master student with a background in Chemistry or Physics? Are you a team player who enjoys lab work? Then this internship could be interesting for you!

Background information

The department of defectivity focuses on studying the root cause of defects (contaminant particles or damages) with the goal of containing and reducing the number of defects found on the wafer and reticle. The challenge we face is correctly characterizing the particle material to identify the root-cause of the particle.

Currently, we use EDX to find the material composition, but this gives very limited data when trying to separate different polymers from each other. Hybrid techniques like AFM-IR look very promising as particles below 1 micron can be analyzed in great detail. AFM-IR machines have not been adapted for ASML test cases: studying particles on 300mm round Si wafers or 150mm square reticles. We typically scan these large surfaces to detect and locate the defects with an inspection tool and subsequently a separate tool is used for material analysis. Our biggest concern is after inspection and transferring this wafer/reticle to an AFM-IR setup to find back the defects with the AFM probe, as scanning with AFM is very slow.

Your assignment

The goal of this study is the determine, if it is feasible to find defects back on a bare 300mm Si wafer by AFM probe.
Your tasks will be understanding in detail the capabilities of the 300mm wafer AFM probes currently on the market and setting up an experiment to determine:

  • How long does it take on average to search for a particle defect?
  • What is the % of defects that can successfully found back by AFM?

You will prepare relevant wafer samples, perform experiments, and analyze experimental data. Collaboration with tool suppliers might be required.

Your profile

  • You are a master student with a background in preferably Chemistry and Physics. Material Science could also be an option;
  • You are looking to do your master graduation project or interested in gaining work experience;
  • You are a team player who has strong analytical skills;
  • You have experience in analytical chemistry and strong affinity with metrology tools to characterize materials like AFM and FT-IR;
  • You enjoy lab work and have good communication skills for the close collaboration with suppliers;
  • You are available to do a full-time internship with a duration of 5-9 months and start date in June/July 2022.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €500 (plus a possible housing or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?