Mirror Heating Design Engineer EUV Projection

Research & development

Optical engineering

Mechanical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


0-2 years



Job Category

Optical engineering, Mechanical engineering, Physics



Published: 30+ days ago Job ID: req31645

Introduction to the job

ASML is relentlessly driving the semiconductor industry's ongoing quest for producing faster, smarter and more energy efficient chips. We are a young, dynamic, international and highly skilled workforce, creating, with strong support of our suppliers, the lithographic tools the industry needs to achieve its goals.

The beating heart of our lithographic tool is the Projection Optics Box that consists of multiple mirrors that projects the image of the chip’s features onto the wafer substrate. As the optical performance requirements and the throughput of our lithography tools evolve, temperature variations and resulting deformation of the mirrors become more and more challenging for the optical performance. Therefore, we develop solutions to reduce these mirror deformation problem, such as accurate temperature control of the mirrors and prediction and online correction of the aberrations introduced by mirror heating.This involves a broad range of competencies such as thermomechanical physics, optics, fiber & laser physics, control technology, numerical methods, physics modeling, and software architecture and development.

Are you looking for a challenge to design, test, integration and troubleshoot thermal solutions in optical modules? Then you will enjoy this position in the EUV optical column projection team.

Role and responsibilities

As Mirror Heating Design Engineer in the EUV Projection group, your responsibility will be to design, integration and qualify of the mirror heating solutions for the high NA POBs. You will also support the development of tools which assist troubleshooting the thermal performance and thermal solutions in the Projection Optics Box.

The job consists of:

•Specify, design, support implementation, qualify and integrate new mirror heating functionality.
•Contribute, in a team, to the development (design, test, qualification and integrate) of tools which assist analyzing and troubleshooting the mirror heating performance and mirror heating solutions in the EUV projection modules.
•Contribute to troubleshooting and solving issues, escalations and customer specific requests. This involves analyzing data, connecting the results to physical phenomena such as thermal phenomena, material drifts, optical drifts etc., and steer towards the proper solution directions.
•Acquiring knowledge on the mechanisms related to mirror heating in the projection optics and the link to the optical and imaging performance of the entire system.
•Understanding the thermal, mechanical and optical aspects related to mirror heating.
•Contributing to the generation and maintenance of proof book data and machine performance overviews.
•Working in a multi-disciplinary project and collaborate with supplier, factory and customer support teams.

Education and experience

MSc or PhD in Physics, Mechanical or Electrical Engineering, preferably involving competencies for mirror heating solutions: thermomechanical physics, optics, control technology, fiber & laser physics, numerical methods and physics modeling

• Experience working in teams in a multi-disciplinary environment related to complex systems.
• Experience working in an industrial environment is preferred.
• Contributions to thermal conditioning systems and/or applications of optical systems is preferred.
• Experience with thermal, mechanical, optical, material science and software disciplines.
• Ability to think on a functional level and in design details.
• Ability to integrate, test and troubleshoot functions on module or system level.
• Experience with both hardware aspects such as fiber optics or laser systems and software aspects such as modeling.
• Excellent communicational skills.
• Team player with ability to build network towards other parts of the ASML organization.
• Self-propelling, showing initiative and drive, pragmatic attitude.
• Good analytical skills and drive for quality.
• Highly experienced with use of Matlab, Simulink and programming.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Within ASML, the Sector Development and Engineering (D&E) is responsible for the planning, development, and delivery of integrated solutions that meet business requirements. This responsibility also includes the specification of trade-offs across sectors. The department DE EUV Optical Column is responsible for delivery of the projection, illumination, dose control, and EUV light collection functions for the EUV machines. The department develops technical solutions, means and methods and competences to ensure these deliveries in all the different product phases.

This position reports to the ED EUV DE OC Projection Group Leader

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