Physics | Optics Internship: Improve the illumination function of EUV machines

Research & development


Optical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


No experience (Student)



Job Category

Physics, Optical engineering, Mathematics

Published: 30+ days ago Job ID: req33293


Are you a master student in Physics, Mathematics or Optics and are you skilled in MATLAB? Do you have a strong affinity with the challenging technical subject? Then this internship could be interesting for you!

Job Mission

ASML’s lithography machines are being used by our customers to create the next generation microchips. In EUV, extreme ultraviolet light is used in the lithography process. The light generated by the source is translated into the scanner, and modified such that the right distribution of light arrives at the reticle and the wafer. Our illumination group is responsible for this modification of the light, to ensure the correct intensity and angular distributions arise at the reticle.

Job Description

You will be part of the multidisciplinary Illumination project team, contributing to the delivery and improvement of the EUV illumination function. The illumination function is realized by using software and optomechatronic hardware. The essence of this work is in the prediction and calibration of the optical properties of the system and interpreting its performance qualification measurements. Generally speaking there is a large simulation component in the work, often including programming of models and/or the postprocessing of measurement data using Matlab.
The exact assignment will be tailor made, based on your interests and capability, and the existing needs within the group.

Example assignments are:
• Modelling the impact of alignment on system transmission.
• Investigate and optimize an optical performance monitoring (or qualification) method for both time efficiency as well as accuracy.
• Investigate the correction potential of an optical actuator.


  • You are a master student in Physics, Mathematics or Optics.
  • You have good programming skills in MATLAB and are enthusiastic about analytics.
  • You have a strong affinity with the challenging technical subject.
  • You have good communication skills, you are able to work independently, and you are goal oriented.
  • You are available for minimum 3 months and a maximum of 6 months. The exact number of days per week is flexible and will depend on the duration of the internship. The start date of this internship is October 2022.

Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.

Other information

What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 600 euro (maximum), plus a possible housing and/or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.

ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.

We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.

An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

Learn more about this job