Research Scientist - Light Sources

Research & development

Optical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Optical engineering, Physics



Published: 30+ days ago Job ID: req34213

Introduction to the job

At ASML Research, everyone is part of a multidisciplinary team. Physicists, data scientists, chemical engineers, metrology experts and more – all working together in different teams to take on a particular challenge. Each team member brings a different set of skills to attack technical challenges from different angles. The result? Incredibly imaginative breakthroughs at the cutting edge of engineering.

Role and responsibilities

Job Mission
ASML Research is looking for an Expert in light source technology to develop new sources to match our metrology needs

Job Description
You will be part of a project team developing new optical metrology tools to measure specific features of semiconductor devices. These metrology tools are present inside our EUV scanners and as stand-alone measurement stations and measure important parameters, such as overlay and critical dimensions. With the increasing complexity, more layers and the use of a larger variety of materials it is increasingly challenging to measure with sufficient accuracy. To expand our options in this complex field of metrology, we develop new light sources, based on leading edge laser and plasma technology. These light sources make use of nonlinear optics such asharmonic and supercontinuum generation. Your job will be to invent and investigate promising concepts for light sources, both experimentally, through detailed data analysis and modeling, and theoretically.


- Design and build new light sources and the required optical setup to perform experiments.
- Design, and construct (with your team) experiments to demonstrate feasibility of new light source concepts.
- Analyze and model light sources.
- Translate metrology needs to light source requirements.
- Propose and implement improvements.
- Build and maintain a network with experts in academic institutes and industry.
- Proactively educate non-specialists on your field’s key aspects.

Education and experience

- A PhD in Physics, Applied Physics or related field.
- Expert knowledge on lasers and nonlinear optics.

PhD in relevant field and/or 3-5 years experience in industry or academia on related topics.


- Ability to work independently in a dynamic explorative environment.
- Ability to effectively assess a complex problem on the different physical scale levels from meters to nanometers .
- Resilient and firm in challenging situations.
- Strong analytical ability with a pragmatic attitude.
- Critical attitude.
- Good communicational skills and good knowledge of English.
- Able to work in a multidisciplinary team and effectively transfer knowledge to others.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Context of the position:
The holder of the position reports to the group lead Light Sources & Plasma Physics in the Research Department. Operational activities are within optical metrology related projects.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

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