Development engineer wafer defectivity EUV

Research & development

Chemistry & materials science


Mechanical engineering

In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Chemistry & materials science, Physics, Mechanical engineering



Published: 25 days ago Job ID: J-00230088-572

Introduction to the job

Our challenge is to develop, integrate and qualify the EUV systems according to customer specifications, and deliver within time and budget. The MC DE Defectivity department is part of the sector Development & Engineering. Do you enjoy using your creativity to the develop a complex system, do you like solving multi-disciplinary problems, do you like teamwork, sharing your vision, and interacting and working together with many different disciplines? If so you will enjoy ASML – it will be a great opportunity for your professional development and personal growth.

Role and responsibilities

The EUV Wafer Defectivity group is responsible for reducing particle contamination on wafers by providing means and methods to prevent, detect, analyze, predict, control and eliminate particle contamination sources in the scanner. Furthermore, the group must ensure that designs of tools and systems are fit for industrial use.

Each EUV system as a whole must be such that the particle levels on the reticle, wafers, optics and sensors are according to specification.
During assembly and integration of the systems, in our factory and at customers, issues arise and need to be solved. On top of this, new developed systems require ever improving performance.
The Development engineer wafer defectivity EUV must be able to identify issues or areas of improvement by collecting and analysis of system performance data in combination with system configuration and use case information.
Goal is to create and explore proposals for developments and improvements. The challenge is to force design changes and optimizations into work packages and support their execution by the required projects.
To do so, the engineer must have, or must be able to learn, thorough system and module knowledge, knowledge of particle generation processes (tribology, materials, coatings, vacuum), particle transport processes (gas flows, inertia) and particle deposition processes (adhesion, bonding). Last but not least a good dose of common sense is needed.
This combination of skills will enable the engineer to improve system performance and solve issues and by doing so the he or she will make a valuable contribution to our projects and customers.

Education and experience

Masters in physics, mechanical or chemical engineering.


  • a minimum of 5 years experience in relevant domain
  • Industrialexperience in multi-disciplinary projects
  • Can workin a mix of troubleshooting a complex system in parallel with runninginvestigations to make it perform better (hands-on combined with analyticalwork)
  • Isfamiliar with “contamination control”, preferably within ASML
  • Experiencewith statistical analysis is a plus
  • Affinitywith mechanical design / tribology is a plus
  • Affinitywith materials analysis is a pre
  • Experience with customer contact.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

  • Strong analytical ability with a pragmatic attitude
  • Curious, willing to learn new things
  • Can filter root-causes out of complex datasets, and explain it to the other engineers in the team
  • Can work independently in a dynamic, explorative environment, as well as in a team
  • Highly committed and flexible (sometimes working outside office hours, changing requirements and boundary conditions)
  • Robust personality while being a team player is a must.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

The holder of the position reports to the group leader EUV Wafer Defectivity and is operational within multidisciplinary projects.

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