Principal Researcher Computational Methods for Metrology and Sensors

Research & development



Other technical job categories

In a nutshell


Veldhoven, Netherlands


Research & development


8+ years



Job Category

Physics, Mathematics, Other technical job categories



Published: 30+ days ago Job ID: J-00241459-567

Introduction to the job

ASML is extending its strong position in the field of metrology for the semiconductor market. In ASML’s Research department, new concepts and applications are being invented and designed for future markets of lithography and metrology in various fields of semiconductor manufacturing.

Role and responsibilities

Execute high-level research in the field of wafer metrology with application to metrology requirements for future electronic devices in the semiconductor industry, with an emphasis on computational approaches.

Job Description

Various trends in device manufacturing push both lithography and metrology to challenging requirements. This research position is directed towards new approaches and technologies in wafer metrology according to the increased requirements following the lithography roadmaps of ASML’s customers. The intended research will concentrate amongst others on various computational approaches for estimation of relevant metrology parameters out of raw experimental sensor data. New innovative research directions for these computational approaches have to be devised, evaluated and tested, and finally transferred out of the Research department to the receiving ASML business lines.

Education and experience


We are looking for researchers with educational background and strong expertise in one or more of the following fields: Applied math oriented at electromagnetic inverse problems; Computational methods for parameter inference and estimation; Optimization; Machine Learning, Computational Imaging, 3D Imaging, Tomography, CD-SAXS.

For this position, the emphasis is on mathematical methods.

The candidate must have a well proven track record in a number of those fields, resulting from many years of research in this area either at academic institutes and/or at industrial research labs. Interest in developing knowledge in the fields mentioned above but currently not part of the candidate’s expertise is a prerequisite.

The candidate must have a PhD degree in either one of the following fields: Mathematics, Physics (background on computational methods applied to optics especially appreciated).


The ideal candidate has 10+ years of research experience in a complex high-tech environment, where she/he operated as a researcher who did shape and set out inventive and novel approaches hereby exploiting his/her expertise in the above fields of research.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

  • Team-player
  • Convincing personality to propagate his/her technology proposals within the team and within the ASML organization
  • Commitment to team and company
  • High personal ambition and drive
  • Drive to deliver excellent performance
  • Communication skills for communication at various levels in the organization
  • Solution-oriented mind-set

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Context of the position

This project will be carried out at the CMMS-group in ASML Research (CMMS = Computational Methods, Metrology and Sensors). The project is further part of a collaboration with other departments within the ASML organization, in particular the business line ASML-APPS (Applications).

Keywords: computational, metrology, statistical signal processing, machine learning, inverse problems, Scatterometry, optical critical dimension (OCD) metrology, 3D imaging, model based reconstruction, SAXS/WAXS/GISAXS

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