Manufacturing Engineer for EUV Illumination

Research & development

Other technical job categories

In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Other technical job categories



Published: 30+ days ago Job ID: J-00244291-484


Is it your strength to define crystal clear production and service processes and do you want to be involved in the proto and pilot phase of new developments? Do you understand processes and people behavior in complex manufacturing and service environments? Are you able to influence product designs and drive ASML’s system availability, reliability and cycle time? Then the job of Manufacturing Engineer for EUV Illumination might be just the one for you!

ASML’s TWINSCAN systems are the industry’s first production systems that make use of extreme ultraviolet (EUV) lithography. These step-and-scan systems use EUV light, generated by a tin-based plasma source, to enable customers to continue Moore’s law by manufacturing integrated circuits on an ever smaller scale. The Illuminator is one of the optical modules at the heart of these systems which transforms the EUV light as supplied by the source through a set of mirrors into an uniform slit intensity profile at reticle level. It is a highly sophisticated module in which all engineering disciplines come together to achieve the required imaging performance. The Illumination project is the project which is responsible for the development, integration and industrialization of the above-mentioned Illuminator module.

Job Mission:

As an Manufacturing Engineer for EUV Illumination in the D&E EUV Optical Column department, you will be operating in a multi-disciplinary environment as a member of the Industrialization group and as part of the Illumination project.

In this job you will mainly focus on four areas. You will:

  • Be responsible for the design, realization and optimization of the production and service processes of the Illuminator module.
  • Deliver the work preparation and service mix which is needed for respectively the workers in the EUV factory and field service engineers at our customer sites, to be able to build, qualify and service the Illuminator module.
  • Maintain the alignment on agreed cycle time and availability budgets with System Engineering, architects, the EUV Factory and Customer Support, and drive for the implementation of those ideas that are necessary to bring the final performance in line with the agreed specifications.
  • Ensure that the requirements on manufacturability and serviceability are properly documented, and successfully implemented in the product designs and associated manufacturing and service processes.

Job Description:

You will be the focal point between the Development & Engineering, EUV Factory and Customer Support sectors. You will ensure optimal production and servicing of ASML’s EUV lithography systems for the Illumination function. You will do this by ensuring that industrialization requirements, such as cycle time, availability, manufacturability and serviceability are properly taken into account in the designs of new hardware and software solutions.

Your activities will be, among other things:

  • Develop, implement and optimize the production and service processes for the Illuminator module, and point out structural problems and bottlenecks, work out suggestions for improvements, all in close cooperation with surrounded departments, such as the EUV Factory and Customer Support.
  • Write and verify the work instructions for the factory and field service engineers.
  • Provide effective troubleshoot documentation, such as Out of Control Action Plans (OCAPs), Problem Cause Solutions (PCSs) and Deterministic Diagnostic Flows (DDFs).
  • Identify and work out diagnostics improvements for the factory and field service engineers to improve theirtroubleshoot capabilities.
  • Drive continuous improvement by translating lessons learned back into process and product improvements.
  • Maintain alignment on agreed cycle time and availability budgets, and drive for the implementation of those ideas that are needed to bring these important drivers within budget.
  • Transfer knowledge to factory and field service engineers.
  • Provide support (hands-on, if applicable) for factory and customer issues.
  • Manage customer escalations and ensure timely resolution.


MSc degree in Technical Engineering, such as Physics, Optics, Mechatronics, Industrial, Mechanical or Electrical Engineering.


  • At least 3 years of experience in a production environment with high-tech products and complex production and service processes.
  • ASML experience with manufacturing, service and/or integration activities is an advantage.
  • Familiar with product and process development in a concurrent engineering environment.
  • Good understanding of Design for Manufacturing and Assembly, Availability, Reliability and Diagnostics.

Personal Skills:

  • Real team player, and when needed, able to work independently.
  • Good communication skills in both oral and written English.
  • Initiative; take steps proactively to improve processes and products, and to prevent issues.
  • Results oriented; show ownership by accomplishing the agreed industrialization deliverables on time.
  • Quality minded; deliver work of high quality that is in line with industrialization standards.
  • Leadership; drive the implementation of structural solutions that bring cycle time and availability within spec.
  • Recognizes opportunities and challenges; taking own initiative immediately.
  • Ability to take a helicopter view and to put oneself in the position of the customer.
  • Eager and get-it-done mentality.
  • Committed and flexible attitude.
  • Familiar with escalation management.
  • Out-of-the-box thinker.

Incidental traveling to ASML’s customers in Asia or the US might be required in this role.

Context of the Position:

The D&E EUV Optical Column department is part of the EUV business line of ASML. Its task is to specify, develop, integrate, qualify and industrialize the optical column of the EUV lithography machine in specification, time and budget. The holder of this position reports to the group manager of the Industrialization group, which is part of the above-mentioned Optical Column department.

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