28 days ago - J-00243064-893

Senior Scientist - EUV Source Technology

Chemistry & materials science

Other technical job categories

In a nutshell


San Diego - CA, US


0-2 years



Job Category

Chemistry & materials science, Other technical job categories



Introduction to the job

ASML US, LP brings together the most creative minds in science and technology to develop lithography machines that are key to producing faster, cheaper, more energy-efficient microchips. We design, develop, integrate, market and service these advanced machines, which enable our customers - the world’s leading chipmakers - to reduce the size and increase the functionality of their microchips, which in turn leads to smaller, more powerful consumer electronics. Our headquarters are in Veldhoven, the Netherlands, and we have 18 office locations around the United States including main offices in Wilton, CT, Chandler, AZ, San Jose, CA and San Diego, CA.

“This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access controlled technology.”

Role and responsibilities

We have an exciting and unique opportunity to join a dynamic and innovative Technology Development team, focused on conceiving and demonstrating the technologies required for next generations of high-power extreme ultraviolet (EUV) light sources. Based on a laser produced plasma (LPP), our light source relies on a wide range of unique and challenging technologies, ranging from laser light amplification and high-power optical systems to laser produced plasma for EUV generation, electro-optical signal detection and algorithm-based actuation for process control. You are invited to bring your passion, knowledge and expertise in areas of applied physics, plasmas, metrology, optics, controls, lasers, and experiment design to push the boundaries of these technologies forward.

A key challenge to the development of the EUV source is the management of tin debris following the EUV generation process. EUV is generated when intense laser pulses are focused onto molten droplets of tin resulting in an energetic burst of photons. The tin droplet, which just moments before was highly valued as the fuel for the LPP (Laser Produced Plasma), is violently destroyed much like a mini supernova, sending energetic tin debris into the EUV source. The challenge for the Tin Management Group is to define an architecture that can manage the debris from 10’s of thousands of mini supernova's each second to prevent tin from contaminating vessel hardware and source optics. The successful candidate will be comfortable operating in this diverse mix of physics, engineering and materials science, in order to define the tin management architecture for next generations of the EUV source. The successful candidate will also have a passion for innovation, be driven by curiosity, and have deep technical understanding, in order to excel in a Research environment operating at the fuzzy front end of product development.

Duties and Responsibilities:

  • Guide development of high-level architecture for the management of tin debris in the EUV source, in order to improve the EUV generation process.
  • Provide input to technology roadmaps and identify key scientific learning objectives and define corresponding experimental design to arrive at design guidelines, performance requirements and procedures to product teams.
  • Identification of key scientific learning objectives and corresponding experimental design which will further the technological progress of the EUV generation process.
  • Demonstration of system-wide performance targets to meet the future technology roadmap.
  • Develop and execute system and subsystem performance tests, analyze test results and extract actionable knowledge from sub-module to full-system levels.
  • Troubleshoot issues with laser, tin delivery, and optical systems in order to improve the EUV generation process.
  • Document learning and communicate knowledge to engineering and product development teams to guide product improvement and release of new product nodes.
  • Work independently and in teams to deliver on a stated objective, whether it be the pursuit of new knowledge, the demonstration of a new capability, or the characterization of existing performance.
  • Performs other duties as assigned or required.

Education and experience

  • PhD or MS degree with a minimum of 3 years of relevant experience in chemistry, chemical engineering, or material science, physics, or equivalent field.
  • Hands-on experience with complex system design and build, experimentation, characterization, and troubleshooting.
  • Extensive experience with experiment control, data analysis and development of data analysis tools with, for instance, Matlab or Python and data acquisition systems such as NI Labview.
  • Practical experience with breadth of metrology techniques and metrology development for the characterization of complex systems.
  • Deep understanding of scientific research methods and strong curiosity.
  • The successful candidate will not only have excelled in their technical field, but will have demonstrated inter-personal and communications strengths.
  • Ability to clearly and logically communicate ideas and knowledge to various audiences.
  • Demonstrated ability to work effectively as a part of a team and lead investigation and research efforts involving multiple stakeholders and constraints.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information


EOE AA M/F/Veteran/Disability

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