5 days ago - J-00245986-634

Lithography System Performance Engineer (Wafer Defectivity EUV)

Research & development


Mechanical engineering

Chemistry & materials science

In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Physics, Mechanical engineering, Chemistry & materials science



Introduction to the job

Do you enjoy using your creativity to develop a complex system, do you like solving multi-disciplinary problems, do you like teamwork, sharing your vision and interacting and working together with many different disciplines, our factory and customers? If so you will enjoy ASML – it will be a great opportunity for your professional development and personal growth.

At D&E we develop, integrate and qualify EUV scanners according to customer specifications and make sure they can be delivered within time and budget.

Role and responsibilities

The EUV WaferDefectivity team has to identify issues and areas of improvement by collectingand analysis of system performance data in combination with systemconfiguration and use case information.
Goal is tocreate and explore proposals for developments and improvements. The challengeis to force design changes and optimizations into work packages and supporttheir execution by the required projects.
To do so, theengineer must have, or must be able to learn, thorough system and moduleknowledge, knowledge of particle generation processes (tribology, materials,coatings, vacuum), particle transport processes (gas flows, inertia, electrostatics,bouncing) and particle deposition processes (adhesion, bonding). Last but notleast a good dose of common sense is needed.
This combinationof skills will enable you to improve system performance and solve issues and bydoing so you will make a valuable contribution to our projects and customers

Role: In multidisciplinary projects you have an expert role and perform studies to solve issues, to build up understanding and to define structural improvements for Wafer Defectivity.
The activities are executed in close cooperation with Architects, System Engineering, CS, customers and factory.


  • Define, execute and analyse tests to build up understanding of particle sources, transport and deposition. Report out and give advice on follow up
  • Root cause analysis and definition of containments/solutions for escalations at customer and factory
  • Definition and validation (in Veldhoven and at customer) of design improvements and new platforms in close cooperation with HW and SW projects

Education and experience

Educationallevel : Masters in Physics, Mechanical or Chemical engineering.


  • Min 5 years of relevant work experience in the domain area,
  • Industrial experience inmulti-disciplinary projects.
  • Investigation of complex,not yet fully understood issues
  • Combination of troubleshootingand improving an operational system and working on structuralimprovements
  • Familiar with “contaminationcontrol”, preferably within ASML.
  • Experience with statisticalanalysis is a pre
  • Affinity with mechanicaldesign / tribology is a pre
  • Affinity with materialsanalysis is a pre.
  • Experience with customercontact.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

  • Strong analytical skills and apragmatic attitude.
  • Curious, willing to learn newthings.
  • Able to filter root-causes out of complex datasets, drawconclusions and explain to stakeholders
  • Able to work independently in adynamic, explorative environment, as well as in a team.
  • Highly committed and flexible(sometimes working outside office hours, changing requirements andboundary conditions).
  • Robust personality while beinga team player is a must.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

This position requires willingness to travel, severaltimes per year (USA, Asia).

The EUV Wafer Defectivity group is responsible for reducing particle contamination on wafers. We do so by investigating particle sources, particle release and transport mechanisms and how particles deposit on wafers. Based on this understanding and in close cooperation with HW and SW design groups we define solutions for issues, design improvements, design rules and guidelines for manufacturing, install and maintenance.

The holder of the position reports to the group leader EUV Wafer Defectivity and is operational within multidisciplinary projects.

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