Experienced Vacuum Systems Architect

Research & development

Mechanical engineering


Chemistry & materials science

In a nutshell


Veldhoven, Netherlands


Research & development


3-7 years



Job Category

Mechanical engineering, Physics, Chemistry & materials science



Published: 30 days ago Job ID: J-00247108-519

Introduction to the job

You combine a strong analytical and conceptual mind with a pragmatic attitude. You are able to work independently in a dynamic and complex environment, taking the lead and inspiring your colleagues in going the extra mile. You possess a resilient personality, with both feet on the ground, qualifying you as an individual not easy to overlook. You see the big picture without missing the important details and you have experience with managing complex deliverables.

If you recognize yourself in the above, then we are looking for you! Join our enthusiastic and committed team in developing the vacuum solutions for our next generation of EUV scanners and bring ASML’s vacuum competence to the next level!

Role and responsibilities

As Vacuum Flow Architect you will work on the EXE scanner Dynamic Gas Lock (DGL) – the DGL is the in-vacuum gas-separation unit that separates the WS compartment from the project optics vacuum. You are responsible for the translation of the system design into a DGL HW gas flow & vacuum architecture that secures the requirements for sustained transmission over the scanner optics lifetime and suppression of molecular and particle contamination between the wafer stage and projection optics. You create the budgets for flow & pressure, particle & molecular contamination as well as wafer heat load due to gas flow. You define model and design validation tests on the exposure tool or on offline test setups and evaluate the measurement results to set the path forward and come up with new solutions that take us to the next level. Where needed, you will negotiate with other projects to optimize the specifications and work out cross-project solutions to complex problems. Next to your experience in gas flows, particle-, molecular- and heat transport you also have good knowledge of vacuum systems and components that enables you to make the right design choices to achieve the challenging targets for cleanliness and machine availability. You make sure that the HW is working as intended, by involvement from the early design phase until the final integration, together with your team.

Finally, with your expertise you contribute to the knowledge growth of our group, working together and coaching your team members.

Main responsibilities:

  • Translate overall system design into a gas flow & vacuum HW architecture that secures the requirements for sustained transmission over the scanner optics lifetime and suppression of molecular-, particle contamination and wafer heat load.
  • Create design specifications on gas flow, (partial) pressure and outgassing
    Design gas flow architecture and implementation proposals in EUV HW, quantify (predictive & experimental) the performance
  • Negotiate, define, document and present the specifications of HW architecture
  • Steer modeling, analyses and calculations to predict and evaluate the functionality of the DGL HW
  • Take care of the functional integration of the HW: prove, document and present its proper functioning with offline and machine tests
  • Be a critical partner to our internal and external customers: cooperative but always challenging the requests. Provide direction and advise on solutions
  • Contribute to the group competence growth by research, experimental testing and/or cooperation with external research partners

Education and experience


PhD degree in Mechanical Engineering, Applied Physics, Chemical Engineering or a closely related field of study.


  • 5-7 years work experience in industry in related area in technical complex environment
  • Experience with gas flow transport phenomena and/or aerodynamics engineering
  • You have theoretical and practical experience in vacuum systems and applications related to the field of vacuum and sub-atmospheric (rarified) gas flows, including particle, molecular, and heat transfer
  • Experience with vacuum component selection and vacuum system design
  • Experience with system integration and qualification in the fab and at customer site, experience in the semiconductor industry is a prerequisite.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

  • You are a highly motivated team player with excellent social, coordination and communication skills
  • You quickly understand requests and pose the right questions to get to the point
  • You are able to bring your ideas across and get buy-in, based on your solid knowledge of the matter and understanding your customer
  • You are able to perform in highly dynamic environment, stress resilient
  • You organize work effectively and having a systematic approach in problem solving
  • You provide technical direction, motivate and convince your team of professionals: mechanical, flow, thermal designers
  • You have a pragmatic and result-oriented attitude
  • You are an enthusiastic personality with a creative mindset and can-do mentality
  • You stand your ground in discussions with your (internal) customers, suppliers, and project counterparts
  • You are fluent in English (both written and verbal).

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

ASML’s Development & Engineering (D&E) sector is responsible for the specification, design and integration of the ASML machines. In this sector, the Vacuum Architecture group specifies, designs and delivers vacuum & gas flow based EUV scanner solutions and controls to secure high and stable EUV transmission of the optical column while protecting the in-vacuum optics, reticles & wafers from molecular and particle contamination.
Our group is responsible for the conceptualization, specification and functional integration ofthe EUV scanner vacuum architecture and specification of its subsystems. You are the technical expert for an important part of ASML’s EUV lithography platform and interface with most of the scanner modules.

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