Mechanical Lead Design Engineer - DUV technology

Research & development

Mechanical engineering

Optical engineering

Other technical job categories

In a nutshell


Veldhoven, Netherlands


Research & development


8+ years



Job Category

Mechanical engineering, Optical engineering, Other technical job categories



Published: 30+ days ago Job ID: req45616

Introduction to the job

Are you eager to further develop your mechanical expertise? To be part of the state-of-the art technology innovation? If so, then a job of Lead Engineer in Mechanical development at ASML could be the perfect next step in your career.

By applying to this vacancy, you will be reviewed by multiple groups within the DUV Technology department, a short introduction per group can be found at the bottom of this job description. If you have a strong preference towards one of these groups, please mention so in your cover letter, otherwise we'll make a match based on your CV, Cover Letter (and, if you provided:) Design Portfolio.

Role and responsibilities

As a Mechanical Lead Design Engineer you are responsible for realization of high precision mechanical modules, ensuring to meet the specifications in terms of safety, reliability, stability, contamination, cost effectiveness, manufacturability and serviceability. You are working within a multidisciplinary project, steering one or more designers in your team. You interface cross project with Lead Engineers, architects and system engineers.

  • Specify, design and test mechanical constructions and/or (opto-)mechanical subsystems and service mechanisms with a team of design engineers within the restrictions imposed by technical specifications, costs and planning.
  • Translate performance specifications into design specification for main frame constructions and service mechanisms.
  • Creation and validation of new concepts.
  • Prepare planning for modules and sub-modules.
  • Optimization of the design, with a team of designers.
  • Suppliers contact for design and drawing reviews on manufacturability.
  • Definition and execution of final tests to verify the specifications.
  • Cooperation with module integration into the complex ASML systems.

Education and experience

Technical University Masters or Bachelor’s degree in Mechanical Engineering.

  • Minimum of 7 years of experience in a development and engineering organization with the realization of supporting structures and service mechanisms.
  • At least 5 years of experience in leading design teams up to 10 design engineers.
  • Excellent knowledge of design principles for precision mechanics and of designing on stiffness.
  • Experience in the field of manufacturability of high precision mechanical parts
  • Technical communication with suppliers.
  • 3D CAD modeling (preferable UG/NX).
  • Knowledge of machine directives.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

  • Strong analytical ability with a pragmatic attitude.
  • Helicopter view (zoom in – zoom out)
  • Critical on results.
  • Creative problem solving.
  • Good communication skills.
  • Good knowledge of English.

Other information

Within ASML the sector Development & Engineering is responsible for the specification and the design of the ASML products. The department Mechanical Development is designing, building and testing mechanical systems and sub-systems which are fitted into the end products.

Mechanical Constructions
We deliver for the DUV scanner system essential modules like small and big precision frames, service mechanisms, system enclosures and system to fab interfaces. We excel in the mechanical architecture and realization of mechanical infra structures that meet customer expectations and perform on the required aspects of stability, safety, cleanliness, reliability, cost, manufacturability, serviceability, and upgradeability.

Wafer Handling & Positioning
We are responsible for delivering “value for money” solutions on Wafer Stages (DUV) and Wafer Handlers (DUV/EUV) according the ASML and our customers’ roadmaps for installed base and new products . The Wafer Handlers pre-align and condition the wafers, before handling them to the Wafer Stages at a micron accuracy. The Wafer Stages assure proper measurement of the wafers and exposure to the light at nanometer accuracy, with high accelerations (multiple G’s) and velocities. We provide the people, means, methods and technology for the functional specification, design, integration and validation of precision mechanics in atmospheric environment, including all related supporting products.

MBI - Multi Beam Inspection
Within DUVA we are focused on creating machines that inspect semiconductor wafers for defects that have occurred during previous lithography. The used electron-beam inspection can image and measure defects at the nanometer scale, which challenges our engineers to create a wafer inspection platform that is insensitive to any influences which could compromise the inspection. Within the competitive market of wafer inspection, it is also required to build these machines at an attractive price. Herein lie our daily challenges.

Mechanical Layout & Imaging
We deliver both the high level mechanical system architecture as well as the mechanical solutions for the positioning and conditioning of the modules within the complete light path of our DUV machines.

Mechanical System Layout (MSL) delivers the high level mechanical system layout that enables the functionally optimal and cost effective engineering of exposure tools and its build, transport, and install required for our ASML products.

  • Deliver high level DUV mechanical system architecture:
  • Support the required functionality and product roadmap
  • Secure build, transport, install, serviceability, upgradeability and safety aspects
  • At the right cost (balance between cost aspects such as AV, CT, CoG, Engineering capacity)
  • Maximize commonality, including X-BL

The Optical Column mechanical team is responsible for delivering solution on the positioning and conditioning of mirrors, beam splitters and lenses throughout the light path of the DUV machines. Starting with the laser (FC009 Dose Control) then going to the illuminator (FC010), Rema (FC011) and the projection lens (FC012)

The Mechanical Development Yieldstar group develops mechanical hardware for the optical metrology tools of the Business Line Applications. These metrology tools measure e.g. overlay on the customer wafers. Our mechanical hardware is typically comprising supporting frames and covering, interfacing with all the functional modules of the metrology tool.

Manufacturing & Service Tooling
As a part of the department Mechanical Engineering the group Manufacturing and Service Tooling is responsible for the specification, engineering and qualification of product related tooling that is required for manufacturing and servicing of ASML modules (enabling e.g. precision adjustments, qualification).

Within the Manufacturing and Service Tooling group you work on the tools to Position, Adjust, Assemble, Protect, Test and Qualify ASML’s high precision modules. The tools you will develop are crucial to build and maintain our high tech systems.

Some examples of tooling types that are developed:

  • Hand held tools to overcome otherwise impossible service actions in a complex system.
  • High accurate positioning tools (um) range adjustments on <100kg systems
  • Multidisciplinary camera tools for optical alignments
  • Machine size qualification tools to qualify complete system modules

Manufacturing and Service Tooling group is an mechanically oriented yet multidisciplinary group (Electrical , Software, Optical) that operates across all ASML business lines.

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