Collector Engineer for EUV Spectrally Pure Collection

Research & development

Optical engineering

In a nutshell


Veldhoven, Netherlands


Research & development


0-2 years



Job Category

Optical engineering

Published: 13 days ago Job ID: J-00247815-906

Introduction to the job

Are you driven to deliver solutions to your (internal & external) customers meeting their goals and requirements? Do you enjoy engineering work, data analysis and processing? Do you like solving problems using creative thinking? If so, then a job as a Collector Engineer within ASML’s EUV Spectrally Pure Collection group (Collector Module &Coating Robustness team) may be right for you!

The CMC (Collector Module & Coating Robustness) Engineer is responsible for optimizing the CM (Collector Module) mirror cleaning process, analyzing, evaluating, and reporting on Collector field data, automating data processing & proposing improvements. The candidate reports directly to the Group Lead of EUV Spectrally Pure Collection group and works within the Scaled Agile (SAFe) organization.

Role and responsibilities

The Collector Mirror is accountable for 25% of all source part Usage Cost. Today, there are no closed plans to get to collector cost target. Therefore, we need 1x Engineer to analyze/evaluatedata to support collector costs managements & to identify technical cost saving opportunities both @ operational & design level.

As CMC (Collector Module & Coating Robustness) Engineer you are responsible for:

-Optimization of the Collector Module mirror cleaning process in order to avoid any damage to the coating surface.

  • Optimizing the cleaning process includes, but is not limited to:
    Optimization of the cleaning recipes with the currently available HW;
  • Identification, implementation and qualification of HW improvements required to meet the lifetime requirements of the module;

-Feasibility studies for adoption of newcleaning methodologies (HW) to further improve the lifetime of the module.
-Operationalsupport related Cost of Ownership (CoO) of the module with focus oncoating robustness and re-usability.
-Analyzefield data (swap criteria adherence, actual utilization, actualdegradation, actual cleaning success, etc.)
-Automatedata processing (Phyton preferred),
-Identifypotential improvements in order meet the required CoO targets, quantifyingthe expected gain and contributing to the definition ofthe CoO enhancement roadmap
-Supportthe definition, implementation and qualification of a tool to optimize thematching between Collector Modules and Systems (Smart CollectorAllocation) to meet the customer requirements while minimizing costs..
-Providingregular updates on the status of work viapresentations and/or other ASMLdocumentation.

Education and experience

Educational Level
Master’s in Surface Science, Chemistryand/ or Physics.

Experience Knowledge
- Minimum 6 months to 1 year of experience within the semi-conductor industry is a plus
- Experience in collection and interpretation of data in order to uncover patterns and trends (statistical analysis),[JdA1]
-Experience in planning, conducting, analyzing, and interpreting controlled tests to evaluate the relevant factors that influence the value of a parameter or group of parameters (Design-of-Experiments)
-Experience in Python is a plus,
-Experience with SAFe or Agile way of working is a plus.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
To thrive in this job, you’ll need the following skills:

-Team player: Operate as a team-player in cross-functional teams, being collaborative with the team & being culturally aware,
-Ability to analyze vast data and provide technical information/direction,
-Able to drive for results & improvements,
-Fast learner and Self-propelling: being proactive by stepping up when a problem arises, showing initiative and decisiveness,
-Not afraid to take responsibility and are able to step into the mind of a customer,
-Strong communicator (in English),
-Able to be flexible, to receive feedback & make changes accordingly.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

The overall group’s mission is to deliver industrialized and optimal solutions for spectrally pure EUV collection. To enable this we drive competence and function roadmaps for EUV collection, including:
Collector lifetime diagnostics;
-Optics (EUV=Extreme Ultra Violet/DUV=Deep Ultra Violet/IR=InfraRed);
-Source to scanner alignment;
-Industrialization (6p&6s's, MTTR=Mean Time To Repair & MTBI=Mean Time Between Interrupts);
-Collector cost of ownership and lifecycle.

In our daily work we focus on:
-Embed field feedback loop in the design;
-Ensure smooth rollout to customers and Make it Well, Make it Together with CS and Operations.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Need to know more about applying for a job at ASML? Read our frequently asked questions.

Learn more about this job