DUV Function System Engineer Measure Wafer

Research & development


Mechanical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


8+ years



Job Category

Physics, Mechanical engineering, Mathematics



Published: 30+ days ago Job ID: J-00251165-373

Introduction to the job

Do you have experience as liaison between customers and new product improvements at the front end of our cutting-edge industry? Are you seeking for a position combining your in-depth technical knowledge on scanner wafer metrology to your customer-orientation and your sixth-sense for innovation? Let us know, we are looking for you!

Role and responsibilities

The DUV program recently installed the Scanner Measure Wafer product team with the aim to provide complete ‘measure wafer options’ as scanner solutions to both internal and external customers. Within DUV, the variety of applications is growing with the further diversification of the portfolio and customer applications. This ranges from installed base management and new product introduction across XT and NXT immersion and dry systems, in highly innovative, main stream and special application areas (More than Moore).

As DUV System Engineer Measure Wafer you define and lead the execution of product improvements ultimately related to on-product overlay performance and the productivity of DUV systems at our customers. You use customer and technology push/pull insights to influence the technology roadmap of ASML. The solutions you provide with the team are typically developed and used across products and across ASML business lines for commonality and/or compatibility reasons. For example our
alignment strategies and sensor developments need to work in a mix and match EUV-DUV strategy at the customer.

As Function System Engineer Measure Wafer, you lead the design and execution of product improvements related to critical alignment and levelling functionalities of our DUV systems. Your broad expertise on wafer alignment, wafer levelling and customer use cases and applications enables you to set the path for the team to define, validate, expand and accelerate scanner measure wafer solutions for our customers. You work closely with the product system engineer and various multi-disciplinary teams in development and engineering, customer support and Twinscan Factory operations.

Your tasks and responsibilities include the following:
• You interact with ASML field & product marketing in order to select and define measure side improvements of ASML products beneficial to our customer.
• You design, negotiate and validate the related product improvement and its applications, agreeing on feasible specifications, constraints and criteria for success.
• Together with the D&E project teams, you translate this proposal into a plan of action, defining the scope and resources necessary.
• Together with the D&E project teams, you validate the product after implementation of the design.

The resulting product improvement can be related to the introduction of a new technology node in production of the customer or solve a critical issue in the installed base, where on product overlay performance at maximum productivity, low cost, and minimum C-time impact is key.
Planned developments include products, options, CSR’s or x-deliverables in the area of 3DNAND performance, PEP-Align from 55 to 80 up to 100 marks, Alignment model developments (RBF XT, Z2XY, WLG), XT assembly (porting back NXT functionality), and in the Alignment marks competence.
The Scanner Measure Wafer product team has the ambition to deliver wafer to wafer performance, to support the measure side of throughput and to increase application space. As you may expect, the importance of a consistent approach for alignment and levelling strategies will become more and more prominent. A fundamental understanding of the challenges is part of your job.

Education and experience

Min. MSc degree in (applied) Physics, (applied) Mathematics or Mechanical engineering is mandatory.
You have a solid background in several of the following fields: semiconductor manufacturing and process technology, semiconductor device physics, machine design, data analysis, statistics, control theory and/or design of experiment.

You have 7 - 10 years of experience within the semiconductor industry, preferably within photolithography and in the field of overlay, alignment, levelling and/or productivity. You combine in depth technical knowledge and experience in overseeing complex systems and product and/or technology roadmaps. Fab experience is a strong plus.


Working at the cutting edge of tech, you’ll always have new challenges and new problems to solve – and working together is the only way to do that. You won’t work in a silo. Instead, you’ll be part of a creative, dynamic work environment where you’ll collaborate with supportive colleagues. There is always space for creative and unique points of view. You’ll have the flexibility and trust to choose how best to tackle tasks and solve problems.
You represent ASML as an expert in the field and are recognized as such by the customers. Since you
are working intimately with customers and sensitive customer data, a high level of integrity is required.

Furthermore, you have developed the following skills:
• You act decisive and generate solutions effectively.
• You are a fast learner and react adequately to new situations and changing demand.
• You communicate pro-actively, motivating and convincing the relevant stakeholders of your vision.
• You possess strong analytical skills. You are able to zoom in and out, considering the big picture without neglecting critical details.
• You are focused and very much result-oriented.
• You take responsibility for your actions and your opinions.

Diversity & Inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Context of the position

The department of System Engineering is part of the Product and Technology sector of ASML and consists of about 140 employees. As Function System Engineer Measure Wafer, you work in a demanding multidisciplinary environment. Your internal stakeholders are the higher development & engineering (D&E) management, group leaders responsible for resources, project leaders executing the implementation of the product improvement proposal, and fellow system engineers.
You may start with a main responsibility in wafer alignment, for new product development and/or installed base product solutions. You will also (need to) develop to broader product improvements including levelling strategies, productivity and industrialization.

Other information
Travelling a few times per year to customers worldwide is to be expected.

Semiconductors, Lithography, Overlay, Imaging, Focus, Engineering, fab

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