Physics | Optics Internship: Design of Experiment for one step lens calibration

Research & development



Optical engineering

In a nutshell


Veldhoven, Netherlands


Research & development



Job Category

Physics, Mathematics, Optical engineering

Published: 22 days ago Job ID: J-00257214-288


Are you a student with a background in Physics, Optics, Applied Mathematics or similar? Do you have knowledge in MatLab? Are you autonomous and analytical-oriented? Then this internship might be interesting for you!

Background information

In ASML'S factory there is a constant drive for reducing cycle time for setting up EUV scanner. In this context, it needs to be investigated if the current version of the EUV metrology calibration sequence can be reduced further. In the metrology image quality calibration (IQC) team we are aiming to reduce the cycle time for the calibration sequence for the upcoming high-Numerical Aperture (NA) platforms.

Within metrology we combine and process data from many different parts of the machine: imaging, overlay, calibration, set-up and corrections for various effects. A distinction in our department is made between the measurement side (the wafer is being measured), and the exposure side (the wafer is being exposed). The IQC team works on the exposure side for EUV platforms, as well as working together with EUV projection and EUV sensors.

Your assignment

The calibration sequence makes use of many measurements of different sensors, also the calibration sequence needs multiple iterations to converge. This is time consuming. The IQC team has invested time to find out if an efficient measurement layout can reduce the number of measurements, and thus the cycle time.

By using a design of experiments based on the principal components analysis of the Projection Optics Box (POB) data, an efficient measurement layout can be obtained. As an intern you are responsible for expanding this proof of principle. With this, a new calibration sequence for upcoming high-NA platforms can be established.

This assignment is divided into three stages:

  • familiarize with Lens set-up in ASML EUV lithography machines, Principal Component Analysis (PCA) and Design of Experiment (DoE);
  • apply the PCA and DoE to make a prototype to perform measurements and the calibration process;
  • benchmark the outcome of the prototype to the current calibration process (this process can be simulated via available tools).

Your profile

To be the perfect match for this internship, you:

  • are a bachelor or master student with a background in Physics, Optics, Applied Mathematics, or similar;
  • have great knowledge in MatLab;
  • have knowledge in simulation and modelling;
  • are analytical oriented and autonomous;
  • have great communication skills in English, both verbal and written.

This is a master apprentice internship, and it is also suitable for bachelor and master students who want to do a graduation project. The minimum duration is 3 months, 5 days per week (flexible), starting as soon as possible.

Please note that we may only consider applicants who are enrolled as a student to a university for the whole duration of the internship.

This position requires access to U.S. controlled technology, as defined in the United States Export Administration Regulations. Qualified candidates must be legally authorized to access such U.S. controlled technology prior to beginning work. Business demands may require ASML to proceed with applicants who are immediately eligible to access U.S. controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

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