Electrical | Mechanical Engineering Internship: Robust control for reticle heating

Research & development

Mechanical engineering

Electrical engineering


In a nutshell


Veldhoven, Netherlands


Research & development


No experience (Student)



Job Category

Mechanical engineering, Electrical engineering, Mathematics

Published: 30+ days ago Job ID: J-00260370-347


Are you a student with a background in Electrical or Mechanical Engineering, Mathematics or Computer Science? Do you have prior knowledge about robust control theory and Bayesian machine learning? Then this internship could be interesting for you!

Background information

Lithography is a process to project patterns onto photosensitive material via a beam of light. The machines in which these processes take place are called wafer scanners. In the lithographic process, in order to manufacture integrated circuits (ICs), a laser creates (deep/extreme) ultra-violet light to print patterns (images) on a wafer. Thus, of the entire production process, photolithography might be the most crucial technique determining the size with which chip elements can be constructed. Given the current status and the need to maintain the status-quo of ever increasing stringent performance requirements, one would ideally like to have continuous in-line corrections to guarantee performance.

Your assignment

In this project, you will use a combination of physics and data-based control techniques to design a dynamical controller that can provide robust performance and stability. In addition, the robust controller needs to have several intrinsic characteristics:

  • Deal with non-uniform measurements in order to update the predictor’s (internal) states;
  • Be a global controller to deal with different product specifications while guaranteeing robust performance;
  • Possesses smart decision making capability by learning from past in order to deal with sequence induced uncertainties;
  • Combine the cooling nozzle flow with the existing actuation methods;

Finally, the performance, advantages and disadvantages needs to be compared with benchmark and real-measurement data, and against the current state-of-the-art controller.
By the end of your internship you will create a concise report/manuscript and present it at ASML (and your university).

Your profile

  • You are a master student with a background in Electrical Engineering, Mechanical Engineering, Mathematics, Computer Science;
  • You are a master student looking to do your graduation project;
  • You are enthusiastic, autonomous and motivated with an affinity towards (digital) signal processing and stochastic systems;
  • You have prior knowledge about robust control theory and Bayesian machine learning is necessary. Working with GIT is a plus;
  • You have hands-on and proactive mentality;
  • You have excellent programming skills in MATLAB/Python using object oriented programming (OOP) is highly preferred;
  • You are available to do a full-time internship with a duration of 9-12 months.

Please include in your application a list of your grades.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

Other information

Change the world – one nanometer at a time
Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing and/or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML: be part of progress
ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students: getting ready for real-world R&D
We’re a global team of about 29,000 people of 120 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.

In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

Learn more about this job