Development Engineer Precision Engineering – Flatness specialist EUV-Semicon (m/f/d)

In a nutshell


Berlin, Germany

Job ID: 596

Introduction to the job

ASML Berlin GmbH (formerly Berliner Glas GmbH) is a major ASML R&D and manufacturing site, with expertise in optics and wafer chuck technology. Over 1,200 employees work at ASML Berlin in Germany. They develop and produce several key components for ASML lithography systems, including wafer tables and clamps, reticle chucks and mirror blocks.

ASML is a leading supplier to the semiconductor industry. The company provides chipmakers with hardware, software and services to mass produce the patterns of integrated circuits (microchips). Together with its partners, ASML drives the advancement of more affordable, more powerful, more energy-efficient microchips.

Your responsibilities

  • Development and optimizations of process chain for EUV-wafer clamp to further improve functional flatness in the nm-range in alignment with different departments

  • Point of contact for other development groups with regard to flatness performance issues including overlay performance of wafer clamps

  • Technical preparation of requirements for qualification- and measurement process for wafer clamps with focus on flatness

  • Understanding of use case in scanner and transfer in design ideas for wafer clamps with focus on functional flatness and overlay performance

  • Contribution for definition  of manufacturable and necessary flatness specifications with regard to wafer clamp performance

  • Development of products at the limit of technical feasibility

  • Analysis of process risks for manufacturability of products (work on FMEAs)

  • Analysis of impact of manufacturing processes on function and performance of wafer clamp

  • Technical communication with ASML Veldhoven and Wilton in context of development of products

Your profile

  • Master in engineering or science in the area of physics technologies

  • Theoretical comprehension of functional aspects of product concepts

  • Theoretical comprehension of topographical surface descriptions

  • Knowledge of measurement technologies especially in the area of interferometry & electrostatics

  • In-depth understanding of physical properties of materials like glass and ceramics

  • Ideally, knowledge on manufacturing technologies of glass and ceramics 

  • Knowledge of thin film coating technologies 

  • Good analytical and structural way of working

  • High level of self-responsibility and pro activity

  • Good communication skills and ability for teamwork 

  • Fluent business German and English

We offer

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote per-sons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

We offer
  • A job with a promising future in Berlin Neukölln

  • Flexible structuring of daily work hours

  • We reward performance with attractive compensation (including Christmas and holiday bonuses as well as variable compensation components)

  • A varied and innovative work environment on a strong team

  • We offer you specific opportunities for advanced training and development so that we can realize your professional plans for the future together

  • Flat hierarchies and short decision-making processes that encourage independent work

  • The opportunity to convert variable compensation components into additional days off

  • We promote team spirit through regular company events

  • Extensive health and sports offers (e.g. subsidy for sports activities, health days, company doctor, free vaccinations, etc.)

  • A variety of attractive discounts


We are looking for people who can shape the future with us and inspire themselves and others for innovative technologies, new challenges and future-oriented solutions. Does this appeal to you? Then apply using our online application form, stating your salary requirements and earliest possible joining date. We look forward to receiving your application.

Your contact

Elvira Stamm
HR Department
[email protected]

Please use our online portal for your application. 

Questions regarding the recruitment process? Here you can contact us directly: +4971189989397.